2002
DOI: 10.1016/s0168-583x(02)00779-6
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Refractive index and dielectric constant of the boron and fluorine diffused polyimide

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Cited by 28 publications
(22 citation statements)
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“…The polarizability of the fluorinated polyimides is decreased as the number of fluorine atoms is increased, due to the lower electronic polarizability of a C-F bond relative to that of a C-H bond that has been displaced. [22,23] The free volume concomitantly increases due to the relatively large volume of fluorine compared with hydrogen, which reduces the number of polarizable groups per unit volume.…”
Section: Polarizability and Free Volumementioning
confidence: 99%
“…The polarizability of the fluorinated polyimides is decreased as the number of fluorine atoms is increased, due to the lower electronic polarizability of a C-F bond relative to that of a C-H bond that has been displaced. [22,23] The free volume concomitantly increases due to the relatively large volume of fluorine compared with hydrogen, which reduces the number of polarizable groups per unit volume.…”
Section: Polarizability and Free Volumementioning
confidence: 99%
“…This behavior could be attributed to the dependence of the polarization mechanisms. 24,25 As water has a very high dielectric constant, absorption in even small amounts can affect the dielectric constant of polyimide films. Absorbed water in the package has a critical effect on the electrical properties of polyimide films.…”
Section: Mechanical and Electrical Propertiesmentioning
confidence: 99%
“…Consequently, C-F bonds have relatively stronger than other C-X bonds. Therefore, the intensity of carbon-fluorine groups is increased as a function of the treatment gas [11][12][13][14][19][20][21]. Fig.…”
Section: Thermal Conversion From Polyamic Acid To Polyimidementioning
confidence: 99%
“…Generally, the high ionization potential of fluorine and its relatively low polarizability imply very weak intermolecular interactions. This is explained by the electrons of fluorine being very tightly held and close to the nucleus [18,19]. Therefore, the electronic polarizability of the fluorinated polyimides is decreased as the number of fluorine atoms substituted for hydrogen is increased, due to the lesser electronic polarizability of a C-F bond relative to that of a C-H bond [10,21].…”
Section: Dielectric Characteristics Of Polyimide Thin Filmmentioning
confidence: 99%