A study on dielectric characteristics of fluorinated polyimide thin film

Polymer Dielectric Materials

“…These effects can be exemplified by introducing fluorine into a polymer chains. [20] Fluorination of polyimide film was performed through gaseous phase in a vacuum chamber. The impregnated fluorine content was determined using XPS analysis and the dielectric constant is shown as in following Table 3.…”

A study of atmospheric-pressure CHF3/Ar plasma treatment on dielectric characteristics of polyimide films

“…Polymers as dielectric materials play a significant role in achieving the current state of the art in microelectronics [1,2]. Polymeric materials not only are found in final products such as component housings, integrated circuit (IC) chip packagings, and intermetallic dielectric layers, but are also employed extensively in major processing components such as resisters in microlithography [3][4][5][6].…”

Influence of fluorination on surface and dielectric characteristics of polyimide thin film

“…It also increases the free volume due to the relatively large volume of fluorine compared with hydrogen, which reduces the number of polarizable groups per unit volume. From this, the dielectric constant of the fluorinated polyimides decreases as the fluorination concentration increases [10,11].…”