Reductive Corrosion of ITO in Contact with Al in Alkaline Solutions

Abstract

Tin-doped indium oxide (ITO) layers show severe corrosion in alkaline solutions when they are in electrical contact with A1. This corrosion process is investigated by etching experiments, electrochemical measurements, and analytical techniques. It is shown that A1 maintains ITO at a cathodic potential where it is reduced. A1 itself is oxidized and dissolves as AlOe. The products of the ITO corrosion are most probably SnO~-, which dissolves in the solution, and In metal, which forms grains at the surface. This causes a gray opaque appearance and a disconnection between the ITO and A]. When there is no longer electrical contact, the A1 dissolution proceeds but the ITO attack is found to stop.

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