“…For each sample, all structures on the substrate are formed simultaneously by depositing Pt, Py, AlOx, and Cu from different angles through a set of mesoscopic suspended shadow masks, which are created by electron beam (e-beam) lithography from two layers of e-beam resists: the PMGI (polydimethylglutarimide) resist on the bottom and the PMMA (polymethyl methacrylate) resist on the top. Details of the shadow maskand angle deposition method can be found elsewhere[3,[27][28][29].The measurements of the 6 samples have been carried out either in a variable temperature probe station or in a pulse-tube variable temperature cryostat. All measurements are conducted at 10 K. The SHE and ISHE measurements from a structure with 6 nm Pt are shown inFig 2 (a) and (b), respectively, and the corresponding measurement configurations are shown in the insets.…”