2020
DOI: 10.1088/1361-6528/ab9e90
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Reduction of random telegraph noise by high-pressure deuterium annealing for p-type omega-gate nanowire FET

Abstract: In this work, we studied the effect of high-pressure deuterium annealing (HPDA) on a p-type omega-gate nanowire field effect transistor by random telegraph noise (RTN) signal analysis. After HPDA under conditions of 400 • C and 10 atm for 30 min, I OFF decreases by 41.2% and I ON increases by up to 5.4%. Also, subthreshold swing (SS) is reduced from 72 mV dec −1 to 70 mV dec −1 . In RTN analysis, multi-level RTN is reduced to single-level RTN due to the passivation of a fast trap site by HPDA. ∆I D /I D is als… Show more

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Cited by 11 publications
(6 citation statements)
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References 40 publications
(43 reference statements)
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“…Unlike in all metal/insulator/metal devices previously studied, if the bias is held constant a cyclical filament formation and disruption at random times occurs (see Figure 5b). More importantly, the mean on/off current ratio statistically observed in Figure 5b is >100, which is the highest ever reported in the literature for a random signal of telegraphic characteristics when compared not only to other reports on h‐BN [ 12,37,47,54 ] but also TMOs, [ 11,52,55,67–72 ] ultra‐scaled transistors [ 73–78 ] and nanowires [ 79–87 ] (see Figure 5c). This behavior, which remains stable over time, cannot be strictly called RTN because this term has been always employed in the literature to refer to charge trapping and de‐trapping, while here it is related to ionic movement; hence, we propose to call it random telegraph signal (RTS)‐like current.…”
Section: Resultssupporting
confidence: 50%
“…Unlike in all metal/insulator/metal devices previously studied, if the bias is held constant a cyclical filament formation and disruption at random times occurs (see Figure 5b). More importantly, the mean on/off current ratio statistically observed in Figure 5b is >100, which is the highest ever reported in the literature for a random signal of telegraphic characteristics when compared not only to other reports on h‐BN [ 12,37,47,54 ] but also TMOs, [ 11,52,55,67–72 ] ultra‐scaled transistors [ 73–78 ] and nanowires [ 79–87 ] (see Figure 5c). This behavior, which remains stable over time, cannot be strictly called RTN because this term has been always employed in the literature to refer to charge trapping and de‐trapping, while here it is related to ionic movement; hence, we propose to call it random telegraph signal (RTS)‐like current.…”
Section: Resultssupporting
confidence: 50%
“…The analysis of a single-trap RTS results in amplitude between two levels and average dwell times at the high and the low levels. Recently, for miniaturized devices down to nanometer sizes, complex RTSs with multiple distinct levels of states are frequently encountered, possibly induced from only a few countable traps [ 57 , 68 , 69 , 70 ]. Thus, a tool to assess multi-level RTS signals is required [ 69 , 71 ].…”
Section: Noise Processesmentioning
confidence: 99%
“…3) If trapping/detrapping processes at a certain defect dominate the LFN characteristics, trap occupancy switching results in a discrete current fluctuation (two or multilevel RTN). [36][37][38] However, a Gaussian distribution of the current amplitude is observed in the sensor. Figure 3d shows the variation of I D over time in the bias condition where the Lorentzianlike noise is observed.…”
Section: Lfn Characteristics Of the Fet-type Gas Sensor With A Wo 3 S...mentioning
confidence: 99%