Reducing the Hygroscopic Swelling in MEMS Sensor using Different Mold Materials

Kumari, Pinki; Singh, Kuldeep; Singal, Anuj

doi:10.11591/ijece.v10i1.pp494-499

Cited by 4 publications

(4 citation statements)

References 23 publications

(23 reference statements)

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“…Gyroscopes are mechanical gadgets that are used to measure the angular rate of rotation. MEMS gyroscope and magnetometers innovation currently give this function in various packages that are generally integrated into a sensor module or chip and broadly used in a variety of applications [23]. MEMS gyroscope utilizes a minuscule micromechanical framework on silicon structures, supporting the motion to electrical transducer functions.…”

Section: Inertial Sensorsmentioning

confidence: 99%

Pose estimation algorithm for mobile augmented reality based on inertial sensor fusion

Alam

Morshidi

Gunawan

et al. 2022

IJECE

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<span>Augmented reality (AR) applications have become increasingly ubiquitous as it integrates virtual information such as images, 3D objects, video, and more to the real world, which further enhances the real environment. Many researchers have investigated the augmentation of the 3D object on the digital screen. However, certain loopholes exist in the existing system while estimating the object’s pose, making it inaccurate for mobile augmented reality (MAR) applications. Objects augmented in the current system have much jitter due to frame illumination changes, affecting the accuracy of vision-based pose estimation. This paper proposes to estimate the pose of an object by blending both vision-based techniques and micro electrical mechanical system (MEMS) sensor (gyroscope) to minimize the jitter problem in MAR. The algorithm used for feature detection and description is oriented FAST rotated BRIEF (ORB), whereas to evaluate the homography for pose estimation, <a name="_Hlk100294718"></a>random sample consensus (RANSAC) is used. Furthermore, gyroscope sensor data is incorporated with the vision-based pose estimation. We evaluated the performance of augmenting the 3D object using the techniques, vision-based, and incorporating the sensor data using the video data. After extensive experiments, the validity of the proposed method was superior to the existing vision-based pose estimation algorithms.</span>

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Section: Inertial Sensorsmentioning

confidence: 99%

Pose estimation algorithm for mobile augmented reality based on inertial sensor fusion

Alam

Morshidi

Gunawan

et al. 2022

IJECE

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“…It has been established that closed-loop operation increases the linearity, dynamic range, as well as frequency range of capacitive accelerometers. A high-Q sensor unit can be electrically made under-damped using a closed-loop architecture without unnecessary complexity, which is not achievable with an open-loop system [3]- [5]. Gyroscope and accelerometer applications, among others, have benefited from the sigma-delta modulation technique used in analog-to-digital converters [6]- [9].…”

Section: Introductionmentioning

confidence: 99%

A sigma-delta interface built-in self-test and calibration for microelectromechanical system accelerometer's utilizing interpolation method

Ahmed

Al-Gayem

2023

IJECE

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This work presents the capacitive micromechanical accelerometer with a completely differential high-order switched capacitor sigma-delta modulator interface. Such modulation interface circuit generates one-bit output data using a third sigma-delta modulator low-noise front-end, doing away with the requirement for a second enhanced converter of resolution to encode the feedback route analog signal. A capacitive micromechanical sensor unit with just a greater quality factor has been specifically employed to give greater resolution. The closed-loop and electrical correction control are used to dampen the high-Q values to get the system's stability with high-order. This microelectromechanical system (MEMS) capacitive accelerometer was calibrated using a lookup table and Akima interpolation to find manufacturing flaws by recalculating voltage levels for the test electrodes. To determine the proper electrode voltages for fault compensation, COMSOL software simulates a number of defects upon that spring as well as the fingers of the sensor system. When it comes time for the feedback phase of a proof mass displacement correction, these values are subsequently placed in the lookup table.

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“…A suitable calibration method needs to decrease the mistakes that are inherent in them. Tese sensors found usage in a wide range of applications, including navigation and positioning systems, educational software, medical electronics, and more [1][2][3]. Researchers have also recently examined the usage of MEMS devices in user interfaces [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Three-Axes Mems Calibration Using Kalman Filter and Delaunay Triangulation Algorithm

Ahmed,

Al-Gayem

2023

Applied Computational Intelligence and Soft Computing

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MEMS-IMUs are widely used in research, industry, and commerce. A proper calibration technique must reduce their innate errors. In this study, a turntable-based IMU calibration approach was presented. Parameters such as the bias, lever arm, and scale factor, in addition to misalignment, are included in the general nonlinear model of the IMU output. Accelerometer error parameters were estimated using the transformed unscented Kalman filter (TUKF) with triangulation algorithm is suggested for calibrating inertial measurement unit (MPU6050) three-axes accelerometer. In contrast to the present methods, the suggested method uses the gravitational signal as a constant reference and necessitates no external equipment. The technique requires that the sensor be positioned in a rough orientation and that basic rotations be adopted. This technology also offers a quicker and easier calibration. Comparing the experimental findings with other works, Allan deviation shows significant improvements for the bias instability, where a bias instability of (0.116 μg) is achieved at temperatures between (−15°C) and (80°C).

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Reducing the Hygroscopic Swelling in MEMS Sensor using Different Mold Materials

Cited by 4 publications

References 23 publications

Pose estimation algorithm for mobile augmented reality based on inertial sensor fusion

Pose estimation algorithm for mobile augmented reality based on inertial sensor fusion

A sigma-delta interface built-in self-test and calibration for microelectromechanical system accelerometer's utilizing interpolation method

Three-Axes Mems Calibration Using Kalman Filter and Delaunay Triangulation Algorithm

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