Reducing solid conduction in electrothermally driven MEMS Pirani gauge using integrated polymeric thin film

Garg, Manu; Arya, Dhairya Singh; Kumar, Sushil; Chiu, Yi; Kumar, Sushil

doi:10.1063/5.0079857

Cited by 10 publications

(3 citation statements)

References 13 publications

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“…Since its invention, the quest for wider dynamic range, power efficiency, and improved sensitivity has been active [8][9][10][11][12][13][14][15]. Different approaches based on structural and dimensional optimizations were proposed for improving the gauge performance [9]. The lower vacuum detection limit of a typical Pirani gauge depends on the ratio of gaseous conduction to solid conduction [10].…”

Section: Introductionmentioning

confidence: 99%

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Garg,

Arya,

Kumar

et al. 2024

J. Micromech. Microeng.

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An electrostatically actuated all-metal MEMS Pirani gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap Pirani gauges, an electrostatic mechanism is employed to tune the gaseous conduction gap. Due to the electrostatic force between the heating element and heat sink, this tuning results in shifting the transition pressure to a higher pressure. As a result, the operating range of the Pirani gauge can be tuned depending on the magnitude of the actuation voltage. Theoretical estimation of the transition pressure corresponding to different gaseous conduction gaps is also presented. Depending on the available margin of gap tuning, the electromechanical and electrothermal analyses are carried out in COMSOL Multiphysics. The analytical approach is validated by experimentally characterizing the fabricated device. The experimentally tested device with the proposed actuation mechanism shows an 11.2 dB increase in dynamic range in comparison to the conventional design. In a CMOS-compatible fabrication process flow, the proposed gauge can be used to monitor vacuum from 40 Pa to 5×10^5 Pa with the electrostatic actuation.

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Section: Introductionmentioning

confidence: 99%

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Garg,

Arya,

Kumar

et al. 2024

J. Micromech. Microeng.

Self Cite

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“…In view of this, miniaturization of Pirani sensors is of significance. In recent decades, the development of MEMS technology has greatly promoted the miniaturization of traditional sensors [30][31][32][33][34][35][36][37][38][39][40][41][42][43]. The miniaturized Pirani sensors, also known as the MEMS Pirani sensors, can not only reduce the weight and size of the devices, but also can cut down power consumption and production costs [44][45][46][47][48][49][50][51][52][53][54][55].…”

Section: Introductionmentioning

confidence: 99%

Overview of the MEMS Pirani Sensors

Zhou

Shi

et al. 2022

Micromachines

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Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications.

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“…Garg et al proposed an electrothermally actuated Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System) Pirani meter with an integrated polymer film. Experimental results showed that the integrated polymer film was very effective in providing mechanical strength to metal resistors and reducing solid conduction losses to the substrate [10]. Li et al believed that due to the development of smart devices, embedded and ubiquitous communication technologies, and the combination with the online world, film media operations had become more important to the real world.…”

Section: Introductionmentioning

confidence: 99%

Operation Mode and Creation of Film Media Based on the Internet Logic under the Field Theory

Shen

2022

Mobile Information Systems

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With the development of information technology and new media technology, the Internet has had a profound impact on the development of the film and television industry. Mainstream media, new media, Internet companies, cultural media companies, etc. are all eager to try, and the forces from the state, capital, media, and users are intertwined. The film and television field is the behavioral practice field of various stakeholders. Capital stimulates the industrial functions of the film and television industry from the perspective of commercial interests. The interests of users are being redefined in the context of the Internet, and the film and television industry actively promotes the creative process from its own interests. In order to analyze the influence and motivation of the Internet on the operation mode and creation research of the film and television media industry, this paper relied on Bourdieu’s field theory to explore the forces and interests that promote the development of the film and television media industry from different aspects. This provided development suggestions for the construction of a new pattern combining the Internet and film media. The integration of film and television and the Internet has become the new normal in the film and television industry. At present, people’s online entertainment time at home has increased significantly, which has led to a rapid increase in the number of movie viewers. The introduction of Internet technology into the film industry media operation model can improve the operation efficiency of enterprises by 6.5%.

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Reducing solid conduction in electrothermally driven MEMS Pirani gauge using integrated polymeric thin film

Cited by 10 publications

References 13 publications

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

Overview of the MEMS Pirani Sensors

Operation Mode and Creation of Film Media Based on the Internet Logic under the Field Theory

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