This survey deals with conduction mechanisms in ,thin ~%ns, both metals and dielectrics, in the thickness range 'between 1O-6 and 10m6 cm and generally under 2-3 X 10vB cm. Conduction in metals with an island structure is discussed in terms of a thermally-activated process based on a model suggested by Frenkel. The model makes it possible to interpret the behavior qualitatively.Dielectrics exhibit a tunneling-like behavior and/or a Schottky-like behavior depending on thickness and temperature. Anom~>lous effects such as the negative resistance sandwich structure and gap structures with low work functions are also discussed. A= E := e := J := ]c := P := T := u := 4 := SYMBOLS 120 amp/cm" degree' = Richardson's constant E,+, = the so-called dielectric constant, where E,, = 8.854 X 10-l' farad/meter and G = the relative dielectric constant 2.32, written exp amperes/cm' = current density Boltzmann's constant = 1.38 X 10mZ3 joule/degree electronic charge = 1.6 X 10-l' coulomb temperature in degrees Kelvin conductance (ohms-') work function (volts)IHIS SURVEY will be restricted generally to films less than 2-3 X 10d6 cm in thickness. It will deal with metal films which consist of discrete islands, dielectrics and various anomolous effects including thin metal films which have gross discontinuities compared to th'eir thickness, the latter being the only departure from 'emphasis on very thin films.Pri:mary technological interest in very thin films arises from the potential of obtaining cold emission devices cons&ing of a metal-dielectric-metal sandwich structure. In such an application the dielectric and the top (emitting) metal electrode must lie within a critical thickness range.The survey will be concerned primarily with developing mode;.s which are useful in interpreting the phenomena a,nd citing representative work, rather than merely cataloging test results.
MsmrscriptThe negative temperature coefficient (T.C.) of resistance of metallic films below a certain thickness is well established experimentally. Also, there appears to be little doubt that where a negative T.C. is observed the film consists of discontinuous islands of material. The microphysical basis for the decrease in resistance with temperature is not well understood, althoug:h a number of models have been suggested.The writer has chosen to use a model formulated by Frenkel [l] in connection with dielectric breakdown. Since the article is in Russian, the essential features are discussed in the Appendix, where it is seen tha,t, using classical ideas, the electron must have an energy equal to or greater than that given by (17) to escape from the parent ion.Eq. (17) can be applied to the case of a thin metal film consisting of separated islands of metal by defining the symbols a and E to apply to the problem.Assume that the islands are circular discs with a radius a and negligible thickness. The symbol E is defined to be the electric field between islands which are separated by a distance d. To a first approximation 15 will be given by the ratio of V/d whe...