Reconfigurable phase-change photomask for grayscale photolithography

Wang, Qian; Yuan, Guanghui; Kiang, Kian Shen; Gholipour, Behrad; Rogers, Edward T. F.; Huang, Kun; Ang, S. S.; Zheludev, Nikolay I.; Teng, Jinghua

doi:10.1063/1.4983198

Cited by 25 publications

(18 citation statements)

References 26 publications

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“…Utilization of diffraction-limited optical writing system, various reconfigurable metasurfaces, and photonics devices were demonstrated in the thin GST film 97 . With this capability, reconfigurable phase change photomask for 3D optical lithography and waveguides for optical trapping were demonstrated 93,94 .…”

Section: Phase Change Materialsmentioning

confidence: 99%

“…A great variety of active or tunable materials are available in nature and have been used in metamaterials and metasurfaces so far, such as, transparent conductive oxides 47,85,86 , ferroelectrics [51][52][53] , two dimensional (2D) materials (i.e. graphene and MoS 2 ) 49,50,[87][88][89][90][91] , phase change materials [92][93][94][95][96][97][98] , liquid crystals (LCs) 67,[99][100][101][102][103][104][105][106] , and semiconductors 58,107 .…”

Section: Introductionmentioning

confidence: 99%

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Tunable and reconfigurable metasurfaces and metadevices

Nemati

Wang

Hong

et al. 2018

Opto-Electronic Advances

318

205

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Metasurfaces, two-dimensional equivalents of metamaterials, are engineered surfaces consisting of deep subwavelength features that have full control of the electromagnetic waves. Metasurfaces are not only being applied to the current devices throughout the electromagnetic spectrum from microwave to optics but also inspiring many new thrilling applications such as programmable on-demand optics and photonics in future. In order to overcome the limits imposed by passive metasurfaces, extensive researches have been put on utilizing different materials and mechanisms to design active metasurfaces. In this paper, we review the recent progress in tunable and reconfigurable metasurfaces and metadevices through the different active materials deployed together with the different control mechanisms including electrical, thermal, optical, mechanical, and magnetic, and provide the perspective for their future development for applications.

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Section: Phase Change Materialsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Tunable and reconfigurable metasurfaces and metadevices

Nemati

Wang

Hong

et al. 2018

Opto-Electronic Advances

318

205

View full text Add to dashboard Cite

show abstract

“…The transition between these two phases often involves complicated atomic and electronic changes, the mechanism of which has long been a vibrant topic in condensed matter physics and material sciences [5][6][7]. More recently, the control of intermediate states in transitions has been explored for developing dynamically tunable antennae [8,9], beam steering metasurface [10], grayscale photolithography [11] and multi-level memory [12].…”

Section: Introductionmentioning

confidence: 99%

Modified Maxwell Garnett model for hysteresis in phase change materials

Frame¹,

Green²,

Xu³

2018

Opt. Mater. Express

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Analytical modelling of hysteresis is used to provide crucial prediction and insight for phase transitions in materials. Here we present a modified Maxwell Garnett model for analysing electromagnetic hysteresis. The model uses an asymmetric effective medium approximation to describe intermediate states in the phase change, establishing a link between effective medium and hysteresis analysis. Numerical calculation was performed on an example material, vanadium dioxide, for quantitative demonstration and future experimental verification. The model is easy to use, requires very few input parameters, and provides a phenomenological approach to describing electromagnetic hysteresis in various phase change materials.

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“…2 considering eight distinct crystallization levels (equivalent to 3 bits/mark). Recently, the same group used a similar approach to imprint a grayscale image on a 70nm-thick Ge 2 Sb 2 Te 5 film, which was used later as a photomask with multilevel absorption [177]. This mask enables submicron lateral resolution grayscale photolithography to finely control the local exposure dosage necessary for 3D sculpting of photoresists used for fabrication of 3D MSs.…”

Section: Hybrid Dielectric/pcm Metasurfaces For Local Amplitude Controlmentioning

confidence: 99%

Tunable nanophotonics enabled by chalcogenide phase-change materials

et al. 2020

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AbstractNanophotonics has garnered intensive attention due to its unique capabilities in molding the flow of light in the subwavelength regime. Metasurfaces (MSs) and photonic integrated circuits (PICs) enable the realization of mass-producible, cost-effective, and efficient flat optical components for imaging, sensing, and communications. In order to enable nanophotonics with multipurpose functionalities, chalcogenide phase-change materials (PCMs) have been introduced as a promising platform for tunable and reconfigurable nanophotonic frameworks. Integration of non-volatile chalcogenide PCMs with unique properties such as drastic optical contrasts, fast switching speeds, and long-term stability grants substantial reconfiguration to the more conventional static nanophotonic platforms. In this review, we discuss state-of-the-art developments as well as emerging trends in tunable MSs and PICs using chalcogenide PCMs. We outline the unique material properties, structural transformation, and thermo-optic effects of well-established classes of chalcogenide PCMs. The emerging deep learning-based approaches for the optimization of reconfigurable MSs and the analysis of light-matter interactions are also discussed. The review is concluded by discussing existing challenges in the realization of adjustable nanophotonics and a perspective on the possible developments in this promising area.

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Reconfigurable phase-change photomask for grayscale photolithography

Cited by 25 publications

References 26 publications

Tunable and reconfigurable metasurfaces and metadevices

Tunable and reconfigurable metasurfaces and metadevices

Modified Maxwell Garnett model for hysteresis in phase change materials

Tunable nanophotonics enabled by chalcogenide phase-change materials

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