Reconfigurable multivariable MEMS sensor array

Abstract

Research into operational aspects of mini unmanned aerial vehicles (UAV) and structural health monitoring systems (SHM) is being conducted at the Defence Science and Technology Organisation and La Trobe University. A fundamental area of interest is investigating the problems associated with miniaturization of the control and health monitoring sensors for such systems. While many technologies for UAV and SHM systems can be, and have been, adapted from those currently available in large manned aircraft; cost, weight, and size constraints have prevented mini UAVs from including many of the robustness mechanisms common to larger aircraft. Moreover, the ubiquitous nature of the sensing requirements for SHM systems has limited their uptake, due mainly to the same issues of cost, weight and size. This paper details the design of a reconfigurable multivariable MEMS (Micro Electro Mechanical System) sensor array to address these issues. This array is comprised of multiple instances of identical sensors, which can be dynamically reconfigured to achieve the desired measurand(s) with tradeoffs against accuracy. The available measurands include such items as; accelerations, rotational rates, magnetic fields (all in X, Y and Z directions), temperature and pressure. This paper presents the design of a reconfigurable multivariable MEMS sensor array together with simulation results.

Dynamically Reconfigurable Multivariable MEMS Sensor Array for Unattended Systems

“…Research into MEMS has demonstrated that all the required parameters for control, and environment and health monitoring can be obtained from a mass-spring-damping system [4 -8], but in each case the MEMS sensor has been optimised for a single parameter. Previous research by the authors investigated the practicality of using this same mass-spring-damping structure, in a dynamic way, to enable real time reassignment from one parameter to another [9]. This paper extends the research into simulations of a more complete system including some aircraft dynamics along with sensor failure.…”

“…For example, the sensor chip model top level is shown in Figure 5, showing the nine elements and the data amalgamation for each measurement parameter. The model for each element is not shown but is based on previous work that models the element in greater detail [9].…”

High-Efficiency Wavelet Compressive Fusion for Improving MEMS Array Performance

“…Xue Liang et al [4] studied the correlation of a MEMS array and demonstrated its influence on the angular velocity accuracy signal. Previous studies [5,6] presented a design method and a fusion estimation method using MEMS arrays under different scenarios. Moschas Fanis et al [7] proposed a simple and effective method for testing the performance of state-of-the-art MEMS arrays in various engineering applications.…”