Reconfigurable metamaterials for optoelectronic applications

Lin, Yu‐Sheng; Xu, Zefeng

doi:10.1080/15599612.2020.1834655

Cited by 86 publications

(40 citation statements)

References 121 publications

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“…Wafer bonding is a popular technology that can integrate two or more kinds of materials into one heterogeneous system. It has been successfully applied to system-in-package (SiP) and fabrication of heterogeneous structures [ 1 , 2 , 3 , 4 , 5 , 6 , 7 ]. Traditional wafer bonding technology is mainly based on silicon (Si)-based materials and is oriented to the microelectromechanical system (MEMS) packaging [ 8 , 9 , 10 ].…”

Section: Introductionmentioning

confidence: 99%

Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G

Ren

et al. 2021

Micromachines

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Wafer bonding technology is one of the most effective methods for high-quality thin-film transfer onto different substrates combined with ion implantation processes, laser irradiation, and the removal of the sacrificial layers. In this review, we systematically summarize and introduce applications of the thin films obtained by wafer bonding technology in the fields of electronics, optical devices, on-chip integrated mid-infrared sensors, and wearable sensors. The fabrication of silicon-on-insulator (SOI) wafers based on the Smart CutTM process, heterogeneous integrations of wide-bandgap semiconductors, infrared materials, and electro-optical crystals via wafer bonding technology for thin-film transfer are orderly presented. Furthermore, device design and fabrication progress based on the platforms mentioned above is highlighted in this work. They demonstrate that the transferred films can satisfy high-performance power electronics, molecular sensors, and high-speed modulators for the next generation applications beyond 5G. Moreover, flexible composite structures prepared by the wafer bonding and de-bonding methods towards wearable electronics are reported. Finally, the outlooks and conclusions about the further development of heterogeneous structures that need to be achieved by the wafer bonding technology are discussed.

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Section: Introductionmentioning

confidence: 99%

Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G

Ren

et al. 2021

Micromachines

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“…Metamaterials show many unique electromagnetic properties including field enhancement [ 11 , 12 ], negative refraction index [ 13 ], artificial magnetism [ 14 ], electromagnetically induced transparency (EIT) [ 15 ], and so on. By properly tailoring the geometric parameters, metamaterials are able to be easily operated in a wide spectrum range that includes terahertz (THz), infrared (IR), and visible light [ 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ]. Among the whole electromagnetic spectra, THz wave is the transition spectrum that usually occupies the spectrum in the frequency range from 0.1 THz to 10 THz, which is between the IR and microwave wavelength.…”

Section: Introductionmentioning

confidence: 99%

Tunable Terahertz Metamaterial with Electromagnetically Induced Transparency Characteristic for Sensing Application

Zhong

Lin

2021

Nanomaterials

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We present and demonstrate a MEMS-based tunable terahertz metamaterial (TTM) composed of inner triadius and outer electric split-ring resonator (eSRR) structures. With the aim to explore the electromagnetic responses of TTM device, different geometrical parameters are compared and discussed to optimize the suitable TTM design, including the length, radius, and height of TTM device. The height of triadius structure could be changed by using MEMS technique to perform active tunability. TTM shows the polarization-dependent and electromagnetic induced transparency (EIT) characteristics owing to the eSRR configuration. The electromagnetic responses of TTM exhibit tunable characteristics in resonance, polarization-dependent, and electromagnetically induced transparency (EIT). By properly tailoring the length and height of the inner triadius structure and the radius of the outer eSRR structure, the corresponding resonance tuning range reaches 0.32 THz. In addition to the above optical characteristics of TTM, we further investigate its potential application in a refraction index sensor. TTM is exposed on the surrounding ambient with different refraction indexes. The corresponding key sensing performances, such as figure of merit (FOM), sensitivity (S), and quality factor (Q-factor) values, are calculated and discussed, respectively. The calculated sensitivity of TTM is 0.379 THz/RIU, while the average values of Q-factor and FOM are 66.01 and 63.83, respectively. These characteristics indicate that the presented MEMS-based TTM device could be widely used in tunable filters, perfect absorbers, high-efficient environmental sensors, and optical switches applications for THz-wave optoelectronics.

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“…However, the resonant frequency of most of the above devices is immutable. In order to improve the flexibility of THz metamaterials, many tuning methods have been reported, including thermal annealing, laser pumping, electrical tuning, and micro-electro-mechanical systems (MEMS) technology [ 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 ]. Among these methods, MEMS technology can actively modify the resonant frequency by changing the geometric parameters of metamaterial unit cell [ 38 , 39 , 40 , 41 , 42 ].…”

Section: Introductionmentioning

confidence: 99%

“…In order to improve the flexibility of THz metamaterials, many tuning methods have been reported, including thermal annealing, laser pumping, electrical tuning, and micro-electro-mechanical systems (MEMS) technology [ 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 ]. Among these methods, MEMS technology can actively modify the resonant frequency by changing the geometric parameters of metamaterial unit cell [ 38 , 39 , 40 , 41 , 42 ]. It is not limited by materials and external environment, and has a wider tuning range of resonance [ 42 ].…”

Section: Introductionmentioning

confidence: 99%

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Design of Tunable Terahertz Metamaterial Sensor with Single- and Dual-Resonance Characteristic

Yang

Lin

2021

Nanomaterials

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We present two types of refractive index sensors by using tunable terahertz (THz) metamaterial (TTM) based on two concentric split-ring resonators (SRRs) with different splits. By modifying the distance between SRRs and substrate, TTM shows tunable single- and dual-resonance characteristic. The maximum tuning range of resonance is 0.432 THz from 0.958 THz to 1.390 THz. To demonstrate a great flexibility of TTM in real application, TTM device is exposed on the surrounding ambient with different refractive index (n). The sensitivity of TTM can be enhanced by increasing SRR height, which is increased from 0.18 THz/RIU to 1.12 THz/RIU under the condition of n = 1.1. These results provide a strategy to improve the sensing performance of the metamaterial-based sensing device by properly arranging the geometric position of meta-atoms. The proposed TTM device can be used for tunable filters, frequency-selective detectors, and tunable high-efficiency sensors in the THz frequency range.

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Reconfigurable metamaterials for optoelectronic applications

Cited by 86 publications

References 121 publications

Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G

Heterogeneous Wafer Bonding Technology and Thin-Film Transfer Technology-Enabling Platform for the Next Generation Applications beyond 5G

Tunable Terahertz Metamaterial with Electromagnetically Induced Transparency Characteristic for Sensing Application

Design of Tunable Terahertz Metamaterial Sensor with Single- and Dual-Resonance Characteristic

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