Recent Progress in Low-Voltage Field-Emission Cathode Development

Spindt, C.A.; Holland, C.E.; Stowell, R.D.

doi:10.1051/jphyscol:1984946

Cited by 15 publications

(2 citation statements)

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“…In work done prior to this project, it was shown tLt the field-emitter arays are capable of up to at least 1000 A/cm 2 of emission (Spindt et al, 1991), and that tip loadings of at least 500 pA/tip are possible (Spindt et al, 1984). In general, our experience with probing these highperformance regimes has shown that limitations on performance are more often associated with power dissipation at the collector than with the ability of the emitter array to produce emission.…”

Section: Close-spaced Anodesmentioning

confidence: 97%

Field-Emitter Arrays for RF Vacuum Microelectronics

Spindt¹,

Rosengreen²

1992

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Section: Close-spaced Anodesmentioning

confidence: 97%

Field-Emitter Arrays for RF Vacuum Microelectronics

Spindt¹,

Rosengreen²

1992

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“…Even though he demonstrated a superb sensitivity with this type of detectors, but they never received much consideration as a gas detector due to their high manufacturing cost of making sharp tips based on [2]. The major problem with the fabrication of a field ionization detector has been the alignment of the tip to a second electrode (with a sub-micrometer gap) which is sometimes referred to as gate [3].…”

Section: Introductionmentioning

confidence: 97%

<title>Micromachined gas detector based on self-aligned ionization tips</title>

1998

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In this article, a micromachining technique is described which is an improvement to our previous technique. It allows metallic sharp and self-aligned tips to be fabricated for use as a gas detector. The fabrication technique has important advantages which makes it applicable to a wide variety application, in particular gas detection. These include simplicity and a low manufacturing cost. These tips were designed and fabricated with standard IC microfabrication technologies. However, the major highlight and achievement is the use of a low-resolution mask to position sharp tips very close to a second electrode in a simple self-aligned process. The detector exhibits a linear sensitivity response. The minimum-measured sensitivity of the detector, for the selected sample gas (CH3COOH), is 14 ppm and this was accomplished at a modest operating voltage of only 5V. The voltage versus measured current of the detector, reveals a exponential behavior which indicates the field ionization to be responsible for detection process.

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