2006
DOI: 10.1002/pat.664
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Recent developments in the use of two‐photon polymerization in precise 2D and 3D microfabrications

Abstract: The use of two‐photon polymerization (TPP) initiated by a photosensitizer's non‐linear two‐photon absorption in two‐ and three‐dimensional (2D and 3D) microfabrications for various photonic applications has been intensively studied. Since TPP emerged as a new technology over a decade ago, a large variety of micro‐objects including 3D micro‐optical components, micromechanical devices, and 3D photonic crystals have been fabricated using TPP with a high spatial resolution of approximately submicron scale to 100 n… Show more

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Cited by 195 publications
(112 citation statements)
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“…The next challenge is the fabrication of patterns beating the diffraction limit using real multi-photon absorbing photo-resist material. In addition to the experimental technologies developed here, ultra-bright sources of entangled photons [17,18] and multi-photon absorbing photo-resist materials [19] with huge crosssection may be used for such an experiment. Note also that the resolution of quantum lithography can be dramatically improved when the number of entangled photons is increased, since the diffraction limit for N-photon interference is not λ /2 but λ /2N [2].…”
Section: Discussionmentioning
confidence: 99%
“…The next challenge is the fabrication of patterns beating the diffraction limit using real multi-photon absorbing photo-resist material. In addition to the experimental technologies developed here, ultra-bright sources of entangled photons [17,18] and multi-photon absorbing photo-resist materials [19] with huge crosssection may be used for such an experiment. Note also that the resolution of quantum lithography can be dramatically improved when the number of entangled photons is increased, since the diffraction limit for N-photon interference is not λ /2 but λ /2N [2].…”
Section: Discussionmentioning
confidence: 99%
“…Those include optical transparency in the visible part of the spectrum [4] and use of photoinitiators absorbing the UV radiation [5][6][7]. Later makes them perfectly suitable for multiphoton polymerization [5,8] achieved by ultrafast laser and employed in true free-form structuring by 3D laser lithography (3DLL) [9]. Additionally, their refractive index and mechanical properties can be tuned by changing proportion between organic and inorganic part [4].…”
Section: Introductionmentioning
confidence: 99%
“…Direct laser writing (DLW) can be used as an alternative technology for fabrication of 3D metallic micro-/nanostructures [1]. Much effort to develop highly efficient materials and attempts to enhance the resolution as well as improve the fabrication throughput of the technique have been performed during the last decade [2,3]. A special consideration was given regarding its potential application in tissue engineering and regenerative medicine [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…Density and size of nanoparticles depend on seading and reduction times [6]. (1) is covered with conductive layer of metal (20 nm of Ag) (2). Dielectric scotch is formed using selective laser ablation (3) and then the polymeric link if fabricated over it via direct laser polymerization (4).…”
Section: Introductionmentioning
confidence: 99%