2015
DOI: 10.1007/s40830-015-0041-0
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Recent Developments in High-Temperature Shape Memory Thin Films

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Cited by 13 publications
(8 citation statements)
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“…Micro or nano sized thin film shape memory alloys (SMAs) have been already used in many different micro and nano electromechanical systems (M/NEMS) such as microactuators, microvalves, micropumps and mass, temperature or force sensors [1,6,7,10,11,[20][21][22][23][24][25][26][27][28][29][30]. SMA thin films can be patterned with standard lithography techniques thus they can be integrated into MEMS devices [30].…”
Section: Introductionmentioning
confidence: 99%
“…Micro or nano sized thin film shape memory alloys (SMAs) have been already used in many different micro and nano electromechanical systems (M/NEMS) such as microactuators, microvalves, micropumps and mass, temperature or force sensors [1,6,7,10,11,[20][21][22][23][24][25][26][27][28][29][30]. SMA thin films can be patterned with standard lithography techniques thus they can be integrated into MEMS devices [30].…”
Section: Introductionmentioning
confidence: 99%
“…% . Transformation temperatures higher than 100 °C were also shown for thin films. ,, Therefore, Ti–Ta SMA can be utilized to develop high-temperature actuators, where the excellent cold workability of Ti–Ta is a benefit. , So far, most of the interest in Ti–Ta alloys was based on bulk materials beside a few reports about the thin film form. ,,, Motemani et al. , have fabricated Ti 100– x Ta x ( x = 30 and 33) actuator thin films by magnetron sputtering at room temperature. These films showed an actuation response at temperatures above 100 °C, which is promising for development of high-temperature microactuators for applications in microsystem technologies.…”
Section: Introductionmentioning
confidence: 99%
“…In the last two decades traditional and new processing techniques were analyzed from a fundamental and technological point of view [6][7][8][9][10]. Moreover, new alloy systems received considerable attention, including Ni-free shape memory alloys [11], highentropy SMAs [12][13][14][15] and high-temperature SMAs (HTSMAs) [16][17][18][19]. Ma et al [18] have pointed out that SMAs with high transformation temperatures can enable simplifications and improvements in operating efficiency of many functional components designed to operate at temperatures above 100°C in the automotive, aerospace, manufacturing and energy exploration industries.…”
Section: Introductionmentioning
confidence: 99%