2022
DOI: 10.55525/tjst.1108761
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Photo-electrical Characterization of New CuAlNi/n-Si/Al Schottky Photodiode Fabricated by Coating Thin-Film Smart Material

Abstract: Micro/nano scale thin-film shape memory alloys (SMAs) have been used in many different miniaturized systems. Using them as thin-film metal components in fabrication of Schottky photodiodes has started a few years ago. In this work, a new SMA-photodiode device with CuAlNi/n-Si/Al structure was produced by coating nano-thick CuAlNi SMA film on n-Si wafer by thermal evaporation. The photoelectrical I-V, I-t and C-V photodiode characterization tests were carried out at room temperature under dark and different art… Show more

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Cited by 4 publications
(11 citation statements)
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“…While the highest determined responsivity value is 0.49 mA W −1 , the highest detectivity value is 2.69 × 10 9 Jones for 10 mW cm −2 light power density. The obtained results are in good agreement with Schottky-type photodiodes [41][42][43].…”
Section: Resultssupporting
confidence: 83%
“…While the highest determined responsivity value is 0.49 mA W −1 , the highest detectivity value is 2.69 × 10 9 Jones for 10 mW cm −2 light power density. The obtained results are in good agreement with Schottky-type photodiodes [41][42][43].…”
Section: Resultssupporting
confidence: 83%
“…In recent years, Cu-based shape memory alloys (SMAs) [1][2][3][4], the second important SMA group in the class of smart materials family after the superior NiTi SMAs [5][6][7], were successfully utilized as thin film nanolayers of top Schottky metal contact electrodes (which were aimed to have a dynamic electro-mechanical martensite nanostructure based shape memory effect function, good electrical conductivity, and new metal work function values different than those of usual elemental metals) in the fabrication of some new high-performance silicon photodiodes [8][9][10][11][12][13][14][15][16] which can be also regarded as micro/nano M/NEMSs [17][18][19] type new devices, actuators or sensors with photonic features.…”
Section: Introductionmentioning
confidence: 99%
“…However, the prior purpose of using Cu-based SMA thin films is to benefit from the wider composition-tunable work function and better electrical conductivity of Cu-based SMAs, as compared to equatomic NiTi thin films. However, the Cu-based SMAs utilized as Schottky contact metal films in the fabrication of SMA-photodiodes [8][9][10][11][12][13][14][15][16] have not yet reached an adequate number and diversity for comprehensive research on these devices and to fabricate them with higher photodiode performances and more different optoelectronic properties. There is no photodiode work using CuAlV made until now in the literature.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…These exceptional behaviors of SMAs based on martensitic phase transformation are defined as their unique properties of shape memory effect (SME) and superelasticity (SE) [5][6][7]. These versatile alloys have already been utilized for their SME, SE and some other properties in numerous applications including actuator, automotive, aerospace, medical, robotics, micro/nano electromechanical systems (M/NEMS) and photodetectors [6,[8][9][10][11][12][13][14][15][16][17][18][19].…”
mentioning
confidence: 99%