Recent development of ultra small pixel uncooled focal plane arrays at DRS

Li, Chuan; Skidmore, George D.; Howard, Christopher G.; Han, C. J.; Wood, Lewis; Peysha, Doug; Williams, E.; Trujillo, Carlos; Emmett, Jeff; Robas, Gary; Jardine, D.B.; Wan, C. F.; Clarke, Elwood

doi:10.1117/12.720267

Cited by 28 publications

(20 citation statements)

References 4 publications

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“…Thus, both the costs for the infrared chip and for the infrared lens system increase. For this reason, the bolometer pixel pitch in commercial infrared bolometer arrays is designed as small as possible, with reported pixel pitches being as small as 17 lm · 17 lm [21]. The bolometer pixel fill factor b defines the portion of the bolometer pixel area that is used to absorb the incident infrared radiation.…”

Section: Analysis Of Bolometer and System Design Features That Can Dementioning

confidence: 99%

Performance model for uncooled infrared bolometer arrays and performance predictions of bolometers operating at atmospheric pressure

Niklaus¹,

Decharat²,

Jansson³

et al. 2008

Infrared Physics & Technology

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Section: Analysis Of Bolometer and System Design Features That Can Dementioning

confidence: 99%

Performance model for uncooled infrared bolometer arrays and performance predictions of bolometers operating at atmospheric pressure

Niklaus¹,

Decharat²,

Jansson³

et al. 2008

Infrared Physics & Technology

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“…Conventional single-level bolometer arrays typically have the fill factor of 60 to 70% [40,41]. To increase the fill factor, two-layer bolometer design was developed allowing to get it up to 90% [42,43].…”

Section: Uncooled Arraysmentioning

confidence: 99%

“…To increase the fill factor, two-layer bolometer design was developed allowing to get it up to 90% [42,43]. Two-layer "umbrella design" let to get 17×17 μm pixel size [40]. The bolometer legs, and in some cases the sensing material, are placed underneath the bolometer absorbing layer.…”

Section: Uncooled Arraysmentioning

confidence: 99%

IR region challenges: Photon or thermal detectors? Outlook and means

Sizov¹

2012

Semicond. Phys. Quantum Electron. Optoelectron.

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Abstract. Infrared (IR) detectors play now an increasing role in different areas of human activity (e.g., security and military applications, tracking and targeting, environmental surveillance, fire and harvest control, communications, law enforcement, space surveillance of the Earth, medical diagnostics, etc.). Discussed in the paper are issues associated with the development and exploitation of up to date basic IR radiation detectors and arrays. Recent progress of basic for applications focal plane arrays (FPAs) that has rendered significant influence on infrared imaging is analyzed, and comparison of FPA detector performance characteristics is described with account of operational conditions and performance limits.

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“…[3][4][5][6][7][8][9][10][11][12][13] It is expected that the pixel pitch will be further reduced to 12 μm to further enhance the resolution, and reduce the size and costs for uncooled IR camera products. 6,9,14 These factors were the source of motivation for the authors to study and develop smaller pixel pitch structures for uncooled IR detectors.…”

Section: Introductionmentioning

confidence: 99%

Uncooled infrared detectors toward smaller pixel pitch with newly proposed pixel structure

et al. 2013

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Abstract. An uncooled infrared (IR) focal plane array (FPA) with 23.5 μm pixel pitch has been successfully demonstrated and has found wide commercial applications in the areas of thermography, security cameras, and other applications. One of the key issues for uncooled IRFPA technology is to shrink the pixel pitch because the size of the pixel pitch determines the overall size of the FPA, which, in turn, determines the cost of the IR camera products. This paper proposes an innovative pixel structure with a diaphragm and beams placed in different levels to realize an uncooled IRFPA with smaller pixel pitch (≦17 μm). The upper level consists of a diaphragm with VO x bolometer and IR absorber layers, while the lower level consists of the two beams, which are designed to be placed on the adjacent pixels. The test devices of this pixel design with 12, 15, and 17 μm pitch have been fabricated on the Si read-out integrated circuit (ROIC) of quarter video graphics array (QVGA) (320 × 240) with 23.5 μm pitch. Their performances are nearly equal to those of the IRFPA with 23.5 μm pitch. For example, a noise equivalent temperature difference of 12 μm pixel is 63.1 mK for F ∕1 optics with the thermal time constant of 14.5 ms. Then, the proposed structure is shown to be effective for the existing IRFPA with 23.5 μm pitch because of the improvements in IR sensitivity. Furthermore, the advanced pixel structure that has the beams composed of two levels are demonstrated to be realizable. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Recent development of ultra small pixel uncooled focal plane arrays at DRS

Cited by 28 publications

References 4 publications

Performance model for uncooled infrared bolometer arrays and performance predictions of bolometers operating at atmospheric pressure

Performance model for uncooled infrared bolometer arrays and performance predictions of bolometers operating at atmospheric pressure

IR region challenges: Photon or thermal detectors? Outlook and means

Uncooled infrared detectors toward smaller pixel pitch with newly proposed pixel structure

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