Recent Advances in the Research on Non‐Equilibrium Atmospheric Pressure Plasma Jets

Laimer, J.; Störi, H.

doi:10.1002/ppap.200600114

Cited by 65 publications

(50 citation statements)

References 75 publications

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“…Such a configuration is typically achieved by using afterglow (remote) plasmas. A simple way to exploit the advantages of afterglow plasmas for thin film deposition is the use of cold atmospheric pressure plasma jets 7–20. Here, typically the substrate is moved through the afterglow plasma emerging from the excitation volume inside the nozzle.…”

Section: Introductionmentioning

confidence: 99%

Plasma Polymerization of HMDSO with an Atmospheric Pressure Plasma Jet for Corrosion Protection of Aluminum and Low‐Adhesion Surfaces

Lommatzsch

Ihde

2009

Plasma Processes & Polymers

104

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Thin functional films were deposited on aluminum with an atmospheric pressure plasma jet using hexamethyldisiloxane (HMDSO) as precursor. A high dynamic deposition rate on the order of 450 nm · m · min−1 was achieved. Composition and structure of the thin films show a strong dependence on the downstream location of the precursor injection. A 4 mm downstream shift of the precursor injection increases the carbon content in the thin film by a factor of 2.5, as indicated by XPS analysis and alters the degree of cross‐linking according to the FTIR spectra. The coating with the low carbon content (17 at.‐%) provides corrosion resistance for aluminum 2024 unclad exposed for 96 h to a neutral salt spray test. The coating with the high carbon content reduces the adhesion of an epoxy resin to the surface and may be used as a release coating.

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Section: Introductionmentioning

confidence: 99%

Plasma Polymerization of HMDSO with an Atmospheric Pressure Plasma Jet for Corrosion Protection of Aluminum and Low‐Adhesion Surfaces

Lommatzsch

Ihde

2009

Plasma Processes & Polymers

104

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“…The surface pre‐treatment and deposition of thin plasma polymer films by using atmospheric pressure plasma (APP) systems operating in the non‐thermodynamic equilibrium regime is currently an active research field, for the adhesion improvement and surface etching1–5 as well as for layer deposition 6–14. The main advantage of such a system is its applicability to localized coating processes 15.…”

Section: Introductionmentioning

confidence: 99%

Track by Track: The Structure of Single Tracks of Atmospheric Pressure Plasma Polymerized Hexamethyl Disiloxane (HMDSO) Analyzed by Infrared Microscopy

Merten

Regula

Hartwig

et al. 2012

Plasma Processes & Polymers

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A comprehensive infrared microscopic study of single tracks of atmospheric pressure plasma polymerised HMDSO is presented. The effects of different process parameters, i.e. the process gas, the nozzle setting (distance between discharge chamber and injection point of the monomer gas), and the nozzle speed, are investigated. It is shown that the chemical structure of singles tracks is not homogenous along the deposit. An increase of the oxygen content in the process gas or an increase of the excitation energy transferred to the monomer gas increase the relative content of SiOCH3 and SiOH units within the bulk polymer network. The deposition of superposed tracks is studied as well and it is revealed that the structure of the coating is changed compared to the first track.

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“…[1][2][3][4][5] The benefits from utilizing CAPs include the generation of a high density plasma at room temperature which reduces the need for expensive vacuum and confinement facilities. There have been many studies carried out in associated fields to advance practical applications and fundamental theoretical work.…”

Section: All Article Content Except Where Otherwise Noted Is Licensmentioning

confidence: 99%

Electron heating and mode transition in dual frequency atmospheric pressure argon dielectric barrier discharge

et al. 2017

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Plasma ionization, excitation, mode transitions and associated electron heating mechanisms in atmospheric pressure dielectric barrier discharges (DBD) driven by dual radio frequency sources are investigated in this paper. The electrons are found to be heated mainly by the high frequency component in the plasma bulk when discharged in α mode. On the contrary, the low frequency component is primarily responsible for heating in the sheath which is caused by intense motion in the sheath. It was also found that variation of the lower frequency component ratio could effectively modulate the electron energy distribution as determined from time averaged EEDF. The results above have demonstrated that the independent control of plasma parameters via non-linear synergistic effect between the dual frequency sources can be achieved through reasonable selection of processing parameters.

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Recent Advances in the Research on Non‐Equilibrium Atmospheric Pressure Plasma Jets

Cited by 65 publications

References 75 publications

Plasma Polymerization of HMDSO with an Atmospheric Pressure Plasma Jet for Corrosion Protection of Aluminum and Low‐Adhesion Surfaces

Plasma Polymerization of HMDSO with an Atmospheric Pressure Plasma Jet for Corrosion Protection of Aluminum and Low‐Adhesion Surfaces

Track by Track: The Structure of Single Tracks of Atmospheric Pressure Plasma Polymerized Hexamethyl Disiloxane (HMDSO) Analyzed by Infrared Microscopy

Electron heating and mode transition in dual frequency atmospheric pressure argon dielectric barrier discharge

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