A comprehensive infrared microscopic study of single tracks of atmospheric pressure plasma polymerised HMDSO is presented. The effects of different process parameters, i.e. the process gas, the nozzle setting (distance between discharge chamber and injection point of the monomer gas), and the nozzle speed, are investigated. It is shown that the chemical structure of singles tracks is not homogenous along the deposit. An increase of the oxygen content in the process gas or an increase of the excitation energy transferred to the monomer gas increase the relative content of SiOCH3 and SiOH units within the bulk polymer network. The deposition of superposed tracks is studied as well and it is revealed that the structure of the coating is changed compared to the first track.
The influence of different nozzle head geometries and, therefore, the variation of the excitation and relaxation volume on the energy flux from an atmospheric pressure plasma jet to a surface have been investigated. Measurements have been performed by passive calorimetric probes under variation of the gas flow through the nozzle. The results show that the geometry of the nozzle head has a significant impact on the resulting energy flux. The relaxation volume affects the dependence of the energy flux on the gas flow. While there is no significant influence of the working gas flow on the energy flux without a relaxation volume, utilizing a relaxation volume leads to a decrease of the energy flux with increasing working gas flow. Within the analyzed parameter range, the energy flux reveals for both nozzle heads a linear dependency on the applied primary voltage.
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