Recent advances in AFM tip-based nanomechanical machining

Ya, Yan; Geng, Yanquan; Hu, Zhenjiang

doi:10.1016/j.ijmachtools.2015.09.004

Cited by 106 publications

(55 citation statements)

References 107 publications

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“…Among all of these methods, every technique has its own advantages and special applications, but the tip based micro/nano machining is attracting more and more attention for the low-cost, simple operation and high accuracy. The scanning tunneling microscopy (STM), atomic force microscope (AFM) and nanoindenter are three common devices for the TBN technology, especially the application of AFM makes this technology greatly developed, and it has successfully combined the chemical and thermal effects to the traditional mechanical removal [6].…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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Based on the self-developed three dimensional micro/nano machining system, the effects of machining parameters and sample material on micro/nano machining are investigated. The micro/nano machining system is mainly composed of the probe system and micro/nano positioning stage. The former is applied to control the normal load and the latter is utilized to realize high precision motion in the xy plane. A sample examination method is firstly introduced to estimate whether the sample is placed horizontally. The machining parameters include scratching direction, speed, cycles, normal load and feed. According to the experimental results, the scratching depth is significantly affected by the normal load in all four defined scratching directions but is rarely influenced by the scratching speed. The increase of scratching cycle number can increase the scratching depth as well as smooth the groove wall. In addition, the scratching tests of silicon and copper attest that the harder material is easier to be removed. In the scratching with different feed amount, the machining results indicate that the machined depth increases as the feed reduces. Further, a cubic polynomial is used to fit the experimental results to predict the scratching depth. With the selected machining parameters of scratching direction d3/d4, scratching speed 5μm/s and feed 0.06μm, some more micro structures including stair, sinusoidal groove, Chinese character "田", "TJU" and Chinese panda have been fabricated on the silicon substrate.

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Section: Introductionmentioning

confidence: 99%

Experimental investigation of the tip based micro/nano machining

Guo

Tian

Liu

et al. 2017

Applied Surface Science

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“…In the past decades, a wide variety of nanofabrication techniques have been developed to realize the nanoscale patterning of materials on a surface. The scanning probe lithography (SPL) based techniques, which make use of one or an array of sharp scanning tips to induce materials patterning, are particularly interesting because of their simple fabrication mechanism and the versatility to many biological and chemical materials that are difficult to fabricate with conventional fabrication techniques such as photolithography or electron‐beam lithography …”

Section: Introductionmentioning

confidence: 99%

Development of Dip‐Pen Nanolithography (DPN) and Its Derivatives

Liu

Hirtz

Fuchs

et al. 2019

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Dip‐pen nanolithography (DPN) is a unique nanofabrication tool that can directly write a variety of molecular patterns on a surface with high resolution and excellent registration. Over the past 20 years, DPN has experienced a tremendous evolution in terms of applicable inks, a remarkable improvement in fabrication throughput, and the development of various derivative technologies. Among these developments, polymer pen lithography (PPL) is the most prominent one that provides a large‐scale, high‐throughput, low‐cost tool for nanofabrication, which significantly extends DPN and beyond. These developments not only expand the scope of the wide field of scanning probe lithography, but also enable DPN and PPL as general approaches for the fabrication or study of nanostructures and nanomaterials. In this review, a focused summary and historical perspective of the technological development of DPN and its derivatives, with a focus on PPL, in one timeline, are provided and future opportunities for technological exploration in this field are proposed.

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“…A motion platform with micro/nano precision is the most important part in the fields of the micro fabrication, micro characteristic and micro operation [1][2][3][4]. Among various actuators in precision positioning applications, such as shape memory alloy [5], magnetostrictive actuator [6], voice coil motor [7,8] and piezoelectric, etc.…”

Section: Introductionmentioning

confidence: 99%

A novel stick-slip based linear actuator using bi-directional motion of micropositioner

Guo

Tian

Zhang

et al. 2019

Mechanical Systems and Signal Processing

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A stick-slip based linear actuator was proposed in this paper, which applied the axial motion of the micropositioner to adjust the preload, and the lateral motion to drive the slider. The bi-directional motion of the micropositioner was realized through the asymmetric structure of a flexure-based mechanism, which includes two right circular flexure hinges and four leaf-spring flexure hinges. The static analysis, kinematic analysis and optimization design were successively implemented on the flexure-based mechanism. The Finite Element Analysis (FEA) proved the flexure-based mechanism could generate the bi-directional motion as designed. A prototype of the linear actuator was developed and the measuring system was constructed. A modified sawtooth wave with a cycloid fall curve was designed to improve the output property. The experimental results showed the modified sawtooth wave generated larger velocity than the traditional sawtooth wave in same driving voltages, fall times, driving frequencies and loads. The amplification coefficient and resolution of the proposed linear actuator in single step were 3.16 and 60 nm, respectively. The maximal velocity was 26.2 mm/s with the modified sawtooth wave in driving frequency of 500 Hz.

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Recent advances in AFM tip-based nanomechanical machining

Cited by 106 publications

References 107 publications

Experimental investigation of the tip based micro/nano machining

Experimental investigation of the tip based micro/nano machining

Development of Dip‐Pen Nanolithography (DPN) and Its Derivatives

A novel stick-slip based linear actuator using bi-directional motion of micropositioner

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