Realizing a variety of carbon nanostructures at low temperature using MW-PECVD of (CH4+H2) plasma

Further improvements of nano-diamond structures on unheated substrates by optimization of parameters with secondary plasma in MW-PECVD

“…An optimization may be possible that similar energetic conditions are achieved, even in much lower temperature [10,13,14]. Although, the structure and properties of the growing films mainly depend on the nature of the precursors and energy of the impinging ions, various other processing conditions are also highly influential.…”

“…Although, the structure and properties of the growing films mainly depend on the nature of the precursors and energy of the impinging ions, various other processing conditions are also highly influential. We have earlier reported [13,15] that various types of carbon thin film nanostructures may be developed at low temperatures with critical process control.…”

Synthesis of Nanostructure Carbon Films Deposited by Microwave Plasma-Enhanced Chemical Vapor Deposition Technique at Room Temperature

“…energy in comparison to the energy at high pressure condition and the molecule dissociates generally by the electron collision (8). Increasing the Ar concentration may enhance the dissociation of C 2 H 2 molecule which changed the structure from the branched granular to spherical carbon nanoparticles and sheet-like structure.…”

“…The inset shows the ns-carbon sphere of size »0.1 mm. Banerjee et al (8) have found this type of dispersed spherical nanostructure at high temperature (200-300 C) and high pressure (30-70 Torr). Amaral et al (17) have found similar types of structures at very high temperature (650 C) by hot wire CVD technique.…”

“…Thomas and Rao (6) while synthesizing erected carbon sheets at very high temperature of about 800 C by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR PECVD) found crumpled like semi-transparent sheets like structure on copper substrate. There are several plasma-based techniques for the synthesis of carbon nanostructures such as radio frequency (RF) PECVD (7), Microwave (MW) PECVD (8), ECR PECVD (6), filtered cathodic vacuum arc (FCVA) technique (9) etc. Among these techniques, MW PECVD is a versatile technique for the deposition of carbon-based nanostructures such as ultra nanocrystalline diamond (10), carbon nanotube (CNT) (11,12), carbon nanofiber (CNF) (13), and graphene (14,15).…”