Realization of High-Power Highly Efficient GaInP/AlGaInP Ridge Laser Diodes for Recordable/Rewritable Digital Versatile Discs

Abstract

Very efficient and reliable GaInP/AlGaInP red multiple-quantum-well laser diodes for recordable/rewritable digital versatile disc (DVD-R/RW) were successfully developed by low-damage fabrication. Because we adopted dry etching instead of conventional chemical wet etching for the steep ridge sidewalls of laser diodes (LDs), devices could be operated at a high output power over 200 mW at 70 C without showing any unstable higher-order transverse modes. In-situ monitoring tools in metal organic chemical vapor deposition (MOCVD) and dry etching were useful for controlling process parameters precisely, which enhances device characteristics and maintains the reproducibility of device fabrication. A very small beam aspect ratio of 1.78 with a very low vertical beam divergence angle of 15.3 at a high output power was achieved by optimizing the twostep n-cladding layer in our LD structures. These low values of the vertical beam divergence angle and aspect ratio are essential for minimizing the coupling loss between the LD and the objective lens in DVD pickups.

Deep level transient spectroscopy

“…Among these, D3 was attributed to Aluminum related defect, while D 1 and D 2 were not identified. On comparison, it is found that our emission rate data do not show any matching to those reported by Sugiura et al Byungjin et al [8] detected a defect related peak corresponding to energy 0.2 eV in their DLTS spectra of AlGaInP taken under two different ambient i.e. H 2 and N 2 .…”

Growth parameter optimization of the GaInP/AlGaInP active zone of 635nm red laser diodes

“…Compared to devices with wavelengths X650 nm, where promising results have been achieved recently [1][2][3][4], the further reduced barrier heights for electrons and holes and the corresponding high leakage currents are a major challenge for the design of devices in the 63x-64x nm wavelength range [5][6][7]. These lasers operate at the physical limits and suffer from low efficiencies and a high temperature sensitivity.…”