2001
DOI: 10.1143/jjap.40.4903
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Realization of GaAs/AlGaAs Lasers on Si Substrates Using Epitaxial Lateral Overgrowth by Metalorganic Chemical Vapor Deposition

Abstract: In this paper, we report on the fabrication and characterizations of a GaAs-based laser using the epitaxial lateral overgrowth (ELO) technique. ELO is an epitaxial growth technique capable of yielding low-dislocation-density III-V films on Si. To realize the effectivity of this procedure, two types of lasers were fabricated by changing the positions of the top p+-GaAs and metal contact in-line with the ELO layer and in-line with the line seed region. The longer lifetime for the lasers with the top p+-GaAs and … Show more

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Cited by 58 publications
(32 citation statements)
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“…For more information, see http://creativecommons.org/licenses/by/3.0/ the extent of which impacts overall life-time of the device. Initial reports of degradation studies carried out with InAs/GaAs quantum dot (QD) laser structures grown on Ge-on-Si 'virtual' substrates revealed extrapolated lifetimes (doubling of threshold current) exceeding 4600 hours, significantly out performing lasers with quantum well (QW) active regions also grown on Si [13], [14]. This significant result was predicted and has been attributed to two major advantages of using QDs.…”
mentioning
confidence: 99%
See 1 more Smart Citation
“…For more information, see http://creativecommons.org/licenses/by/3.0/ the extent of which impacts overall life-time of the device. Initial reports of degradation studies carried out with InAs/GaAs quantum dot (QD) laser structures grown on Ge-on-Si 'virtual' substrates revealed extrapolated lifetimes (doubling of threshold current) exceeding 4600 hours, significantly out performing lasers with quantum well (QW) active regions also grown on Si [13], [14]. This significant result was predicted and has been attributed to two major advantages of using QDs.…”
mentioning
confidence: 99%
“…With QW active regions, carriers are able diffuse in the plane of the well and therefore capture into a defect state is more probable. This lack of carrier localization compared to QDs, combined with the inability to effectively deflect dislocations, means QW lasers grown on Si substrates experience very short lifetimes [14], [16]. However, it is important to note that the quantum dots used in laser structures are populated via bulk and 2-dimensional states and carrier localisation only occurs if the majority of the carriers populate the localised quantum dot states and not the extended states.…”
mentioning
confidence: 99%
“…[1][2][3][4][5][6][7][8] The materials engineering solutions to circumvent the lattice mismatch include metamorphic growth, 9,10 graded buffer layers, 11,12 selective epitaxial overgrowth, 13,14 and a variety of defect filtering strategies. [15][16][17][18][19][20] One of these engineering solutions is the use of virtual substrates, which consists of low-dislocation-density Ge grown on Si 12,21-23 and subsequently integrating III-V materials.…”
Section: Introductionmentioning
confidence: 99%
“…Several attempts as special buffer layer sequences [1,2] and structured substrates [3] were partly successful and led to demonstrators of transistor and photodetector devices [2,4] which are usually less sensitive to high dislocation densites. However, light emitters, especially laser devices on Si, show only lifetimes of more than a few days [5]. Group-III nitrides are much less sensitive to high dislocation densities and commercially available LEDs have a dislocation density in the range of 10 9 cm -2 .…”
Section: Introductionmentioning
confidence: 99%