Realization of deep 3D metal electrodes in diamond radiation detectors

Abstract

A fabrication technique to create 3D diamond detectors is presented. Deep reactive ion etching was used to create an array of through-diamond vias (TDVs) in a 2 × 2 × 0.15 mm3 electronic grade single crystal diamond detector. The diameter of the TDVs was nominally 30 μm with a pitch of 100 μm between them. The TDVs were filled with chromium using hexavalent chromium electroplating to create 3D electrodes, which were connected electrically by interdigitated electrodes. The fabricated 3D diamond detector responded to both alpha particles and X-rays, exhibiting a charge collection efficiency of 52.3% at 200 V. Comparing to a diamond detector with the same interdigitated electrodes, but no 3D electrodes, confirms that the 3D electrodes are electrically active within the device. The average resistivity of the 3D electrodes is 2.89 ± 0.03 × 10−5 Ω cm, near that of bulk chromium. These results indicate that this fabrication technique is a potential option for 3D diamond detector fabrication.

Progress in semiconductor diamond photodetectors and MEMS sensors

“…When thick high crystal quality is not available, one can tailor the epilayer structure and metal/diamond interface to tailor the photoresponse properties of the diamond DUV detectors. The sensitivity of the diamond DUV sensitivity can be further improved by using 3-dimensional electrode structures [135]. To extend the applications of diamond detectors into more fields, the combination of diamond film with Figure 12.…”

Microporous poly- and monocrystalline diamond films produced from chemical vapor deposited diamond–germanium composites

“…[1][2][3][4][5][6][7][8] A special sort of diamond, porous diamond lms and crystals, is of increasing interest for use in certain applications where a high surface-area-to-volume ratio is necessary. Such a porous diamond has a wide range of potential applications in electrochemistry, 9-13 supercapacitors, [14][15][16][17][18] robust lters, [19][20][21] 3D detectors of ionizing radiation, 22 an efficient adsorbent for hydrogen storage 23 and solid-phase extraction and high-performance liquid chromatography. 24 The porosity of the diamond surface also can be used to tune the wettability of diamond materials.…”

The Effect of Ionising Radiation on the Luminescence Properties of Fluoroperovskites

“…The mobility lifetime product was in the intermediate range for electronic dosimeters. Single crystals of some lead halide perovskites have exhibited µτ over two magnitudes greater than that of NaMgF 3 :Sm [181][182][183], while CVD diamond dosimeters have shown mobility-lifetime products up to two magnitudes lower than that of NaMgF 3 :Sm [180,184,185]. The mobility-lifetime product is proportional to the magnitude of the currents produced during X-ray stimulation and therefore acts as a figure of merit for any aspiring electronic dosimeter compound.…”