2021
DOI: 10.1080/26941112.2021.1877019
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Progress in semiconductor diamond photodetectors and MEMS sensors

Abstract: Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily superior to those of the currently available wide-bandgap semiconductors for deep-ultraviolet (DUV) photoelectronics and microelectromechanical systems (MeMs). the wide-bandgap energy of diamond offers the intrinsic advantage for solar-blind detection of DUV light. the recent progress in high-quality single-crystal diamond growth, doping, and devices design have led to the development of solar-blind DUV detectors satisfying … Show more

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Cited by 149 publications
(64 citation statements)
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“…Additionally, the external quantum efficiency (EQE), which is the number of free carriers generated by one photon, of the devices was calculated from the measured responsivity (R) as EQE = Rhc/eλ and plotted against the wavelength of the incident light (Figure 18). Here, e, h, λ, and c are electron charge, Planck's constant, wavelength, and speed of light, respectively [67].…”
Section: Photodetection Characterizations Of Uv Photodetectors Based On Zno Nanorodsmentioning
confidence: 99%
“…Additionally, the external quantum efficiency (EQE), which is the number of free carriers generated by one photon, of the devices was calculated from the measured responsivity (R) as EQE = Rhc/eλ and plotted against the wavelength of the incident light (Figure 18). Here, e, h, λ, and c are electron charge, Planck's constant, wavelength, and speed of light, respectively [67].…”
Section: Photodetection Characterizations Of Uv Photodetectors Based On Zno Nanorodsmentioning
confidence: 99%
“…Wide band-gap semiconductors (WBG) such as (SiC, GaN, ZnO, TiOX 10 14 are currently considered the best candidates for UV photodetection, due to their chemical stability and high resistance, but their insensitivity to visible light reduce their field of applications.…”
Section: Introductionmentioning
confidence: 99%
“…However, when the thickness of the AlN layer is relatively thin, due to the interface defects between metal/AlN/GaN the tunneling effect, electrons can tunnel the barrier, even if its energy is not very formidable, resulting in a large photocurrent. [ 35,36 ]…”
Section: Resultsmentioning
confidence: 99%