2007
DOI: 10.1002/smll.200600680
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Realization of Atomically Controlled Dopant Devices in Silicon

Abstract: Molecular beam epitaxy and scanning tunneling microscopy (STM) patterning are combined to form highly doped, planar devices in silicon at the atomic level. The absolute device location is registered to microscopic markers (see image; scale bar: 50 μm) for the alignment of surface contacts, enabling the correlation of the electrical properties of atomically controlled devices such as nanowires, tunnel junctions, and nanodots to the dopant location, monitored using high‐resolution STM techniques.

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Cited by 109 publications
(57 citation statements)
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“…Efforts to make such devices have led to atomically precise fabrication methods which incorporate phosphorus atoms in a single monolayer of a silicon crystal [17-20]. These dopant atoms can be arranged into arrays [21] or geometric patterns for wires [16,22] and associated tunnel junctions [23], gates, and quantum dots [24,25] - all of which are necessary components of a functioning device [26]. The patterns themselves define atomically abrupt regions of doped and undoped silicon.…”
Section: Introductionmentioning
confidence: 99%
“…Efforts to make such devices have led to atomically precise fabrication methods which incorporate phosphorus atoms in a single monolayer of a silicon crystal [17-20]. These dopant atoms can be arranged into arrays [21] or geometric patterns for wires [16,22] and associated tunnel junctions [23], gates, and quantum dots [24,25] - all of which are necessary components of a functioning device [26]. The patterns themselves define atomically abrupt regions of doped and undoped silicon.…”
Section: Introductionmentioning
confidence: 99%
“…1-8 These entities can be fabricated directly on surfaces in a bottom-up fashion with scanning tunneling microscopy (STM), [9][10][11] and STM is also used to directly measure their magnetic properties. 12,13 The rich magnetic properties originate in the exchange couplings between the individual magnetic moments [14][15][16][17] and are of great interest for concepts like spin-transfer torque [18][19][20] and spin chirality 21 on the nanoscale, as well as for potential applications in quantum computing.…”
Section: Introductionmentioning
confidence: 99%
“…Significant progress has been realized in the direction of dopant positioning by either top-down approaches, such as single-ion implantation [7,32-34], or bottom-up approaches [35,36]. An alternative way to control the location of the active dopant would be to take advantage of the effects of nanopatterning the channel; by imposing specific patterns on randomly doped channels, the probability of successfully isolating a single dopant is enhanced.…”
Section: Single-dopant Transistorsmentioning
confidence: 99%