Real-time optical monitoring of spin coating

Horowitz, Flávio; Yeatman, Eric M.; Dawnay, E. J. C.; Fardad, Amir

doi:10.1051/jp3:1993253

Cited by 32 publications

(34 citation statements)

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“…Optospinigraphy [11] allows real-time thickness monitoring through successive reflectance extrema, whose distance is associated with a quarter of a wavelength. Light from a laser diode (λ o 660 nm) is used in the interferometer, which is coupled to the spinner and generates for the reflectance, R, a sinusoidal profile as the fluid film flows outward in the disk, in accordance with R Rcos δ;…”

Section: Methodsmentioning

confidence: 99%

“…As the dimension of the thickness must be h m, the spatial solution has the dimension R m l−1∕l1 according to Eq. (11).…”

Section: Theorymentioning

confidence: 99%

“…On other hand, interferometric optical monitoring has risen as a powerful and accurate method for real-time and in situ thickness monitoring in dipcoating [8][9][10] and spin-coating [11][12][13][14] processes. In fact, the interferometric monitoring method is able to provide the typical parameters of the power-law fluid [15] with good accuracy and reproducibility.…”

Section: Introductionmentioning

confidence: 99%

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Spin-coating process evolution and reproducibility for power-law fluids

2014

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A distinct development of an exact analytical solution for power-law fluids during the spin-coating process is presented for temporal and spatial thickness evolution, after steady state conditions are attained. This solution leads to the definition of a characteristic time, related to the memory of the initial thickness profile. Previously obtained experimental data, for several rotation speeds and carboxymetilcellulose concentrations in water, are quantitatively analyzed through the evaluation of their characteristic times and compared with theoretical predictions, thus allowing better understanding of thickness profile evolution and of process reproducibility.

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Section: Methodsmentioning

confidence: 99%

“…As the dimension of the thickness must be h m, the spatial solution has the dimension R m l−1∕l1 according to Eq. (11).…”

Section: Theorymentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Spin-coating process evolution and reproducibility for power-law fluids

2014

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“…These are influenced by other parameters such as substrate or belt thickness variations and present a typical uncertainty of Ϯ2 m [3]. Optical monitoring, on the other hand, has been used through transmission or reflection interferometry for solid thin films under vacuum deposition since the 1950s [4], whereas its application to spin coating of liquid films is more recent [5].…”

Section: Introductionmentioning

confidence: 99%

Analysis of Dip Coating Processing Parameters by Double Optical Monitoring

Horowitz

Michels

2007

Optical Interference Coatings

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Double optical monitoring is applied to determine the influence of main process parameters on the formation of sulfated zirconia and self-assembled mesoporous silica solgel films by dip coating. In addition, we analyze, for the first time to the best of our knowledge, the influence of withdrawal speed, temperature, and relative humidity on refractive-index and physical thickness variations (uncertainties of Ϯ0.005 and Ϯ7 nm) during the process. Results provide insight into controlled production of single and multilayer films from complex fluids by dip coating.

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“…1,2 Application of laser interferometry to monitor spin coating of liquid films, optospinography, started in the last decade and has successfully shown the evolutionary stages of film formation at speeds of as much as 1000 rpm. [3][4][5] On the other hand, dip coating is a century-old technique and is still used largely in batch or continuous manufacturing, especially for coating nonplanar or long-dimensional objects. 6,7 Traditionally, dipcoated film thicknesses are measured by capacitive techniques with typical uncertainties of Ϯ2 m, which are also influenced by other parameters, such as substrate-or belt-thickness variations.…”

Section: Introductionmentioning

confidence: 99%

Double optical monitoring of dip coating with a time-varying refractive index

et al. 2006

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A brief overview of optical monitoring for vacuum and wet-bench film-deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous monitoring of refractive index and physical thickness in real time. Monitoring stability and accuracy are verified during dip coating with a transparent oil standard. This double optical technique is applied to dip coating with a multicomponent zirconyl chloride aqueous solution, whose resulting temporal refractive-index and physical-thickness curves indicate good reproducibility as well as significant sensitivity to changes of film-flow properties during the dip-coating process.

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Real-time optical monitoring of spin coating

Cited by 32 publications

References 0 publications

Spin-coating process evolution and reproducibility for power-law fluids

Spin-coating process evolution and reproducibility for power-law fluids

Analysis of Dip Coating Processing Parameters by Double Optical Monitoring

Double optical monitoring of dip coating with a time-varying refractive index

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