2013
DOI: 10.3390/s131013960
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Real-Time Label-Free Surface Plasmon Resonance Biosensing with Gold Nanohole Arrays Fabricated by Nanoimprint Lithography

Abstract: In this work we present a surface plasmon resonance sensor based on enhanced optical transmission through sub-wavelength nanohole arrays. This technique is extremely sensitive to changes in the refractive index of the surrounding medium which result in a modulation of the transmitted light. The periodic gold nanohole array sensors were fabricated by high-throughput thermal nanoimprint lithography. Square periodic arrays with sub-wavelength hole diameters were obtained and characterized. Using solutions with kn… Show more

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Cited by 27 publications
(11 citation statements)
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“…In this sensor, adsorption of the analyte to the array surface results in a shift in the wavelengths transmitted through the “nanohole” array. 161 The fabrication of these arrays followed the standard NIL imprinting process (with a silicon stamp) of a thermoplastic resist coated on glass wafers ( Figure 2 G). After the imprinting and etching of the residual resist layer, a 50 nm gold layer is deposited followed by the resist lift-off, resulting in a grid of 185-nm-diameter nanoholes with a periodicity of 450 nm.…”
Section: Applications Of Large-scale Lithographic Technologiesmentioning
confidence: 99%
“…In this sensor, adsorption of the analyte to the array surface results in a shift in the wavelengths transmitted through the “nanohole” array. 161 The fabrication of these arrays followed the standard NIL imprinting process (with a silicon stamp) of a thermoplastic resist coated on glass wafers ( Figure 2 G). After the imprinting and etching of the residual resist layer, a 50 nm gold layer is deposited followed by the resist lift-off, resulting in a grid of 185-nm-diameter nanoholes with a periodicity of 450 nm.…”
Section: Applications Of Large-scale Lithographic Technologiesmentioning
confidence: 99%
“…The period in x and y directions is P = 500 nm. The selected values for these parameters were chosen according to previous studies for obtaining high sensitivity to changes in the buffer refractive index in the visible spectral region [43,44]. The nanoarray is located on a glass substrate.…”
Section: Theoretical Methodsmentioning
confidence: 99%
“…In the demolding step, the mold is detached from the molded resist and reused for the next molding cycle. Both thermal- (Im et al 2011;Kumar et al 2014;Lee et al 2015;Martinez-Perdiguero et al 2012;Martinez-Perdiguero et al 2013;Qi et al 2018), and UV-NIL (Chen et al 2009;Nakamoto et al 2012;Verschuuren et al 2015;Wong et al 2013) have been used to produce large area metallic structures for SP biosensing applications. For most cases, nanostructures were formed in a thin polymeric resist layer by NIL.…”
Section: Nanoimprint Lithography (Nil) Is a Replication Technique Utimentioning
confidence: 99%