Reactive Ion etching of TiO2 thin film: The impact of different gaseous

Adzhri, R.; Arshad, M. K. Md; Fathil, M. F. M.; Hashim, U.; Ruslinda, A. Rahim; Ayub, R. M.; Gopinath, Subash C. B.; Voon, C. H.; Foo, K. L.; Nuzaihan, M. N. M.; Azman, A. H.; Zaki, Mohd

doi:10.1109/rsm.2015.7354999

Cited by 5 publications

(3 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In our case, etching down to the etch stop layer reduces the roughness to an acceptable level for our investigations and produced relatively smooth surfaces (see Figure 2b) compared to previously published results. 41,42 We note that reactive ion etching processes have been successfully applied in industrial process chains and therefore do not principally impede the scalability of our fabrication method. 43,44…”

Section: Sample Fabrication Schemementioning

confidence: 99%

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Piechulla,

Fuhrmann,

Slivina

et al. 2021

Preprint

View full text Add to dashboard Cite

Arrays of nanoparticles exploited in light scattering applications commonly only feature either a periodic or a rather random arrangement of its constituents. For the periodic case, light scattering is mostly governed by the strong spatial correlations of the arrangement, expressed by the structure factor. For the random case, structural correlations cancel each other out and light scattering is mostly governed by the scattering properties of the individual scatterer, expressed by the form factor. In contrast to these extreme cases, we show here, 1

show abstract

Section: Sample Fabrication Schemementioning

confidence: 99%

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Piechulla,

Fuhrmann,

Slivina

et al. 2021

Preprint

View full text Add to dashboard Cite

show abstract

“…TiO2 also offers physical and chemical resistance, which can extend the lifespan of a device. However, inducing a precise etching of TiO2 thin-films to achieve a particular profile, is still a challenging task, especially on the nanoscale [14].…”

Section: Introductionmentioning

confidence: 99%

Direct Functionalization of TiO₂/PSS Sensing Layer for an LMR-Based Optical Fiber Reusable Biosensor

Santano Rivero,

Socorro-Leránoz,

Villar

2023

IEEE Sensors J.

View full text Add to dashboard Cite

Functionalization plays a crucial role in the development of biosensors. In this study, bioreceptors were directly immobilized onto the surface of a sensing layer after physical activation, avoiding the need for longer and more complex functionalization systems. This direct immobilization was applied to an optical sensing platform based on lossy mode resonances (LMRs) generated by a thin-film of titanium (IV) dioxide/poly(sodium 4-styrenesulfonate) (TiO2/PSS). To generate the LMR, a 200-micron bare optical fiber was coated with TiO2/PSS using the layer-by-layer self-assembly technique. The PSS of the sensing layer was then physically activated using either UV-ozone or plasma to immobilize anti-rabbit IgG bioreceptors. This enabled specific and label-free detection of rabbit IgG concentrations ranging from 0.002 to 2 mg/ml. The results presented in this work include real-time detection of rabbit IgG, a comparison between the two activation techniques (UV-ozone and plasma), and an analysis of the biosensor's reusability over four consecutive cycles, which demonstrates the promising potential of the TiO2/PSS sensing layer for biosensing applications.

show abstract

“…However, this requires high etch selectivity of TiO 2 towards resist. Studies have been performed on the properties of different reactive gasses, such as CF 4 [26][27][28], SF 6 [28,29], Cl 2 [29,30] and BCl 3 [31]. In this work, we compare systematically the influence of SF 6 , CHF 3 , HBr, BCl 3 and Cl 2 as reactive gas and optimize the etching recipe.…”

Section: Introductionmentioning

confidence: 99%

Low loss TiO2 channel waveguides

Hegeman

Dijkstra

García-Blanco

2020

Integrated Optics: Devices, Materials, and Technologies XXIV

View full text Add to dashboard Cite

TiO 2 is gaining interest as material for integrated photonics, due to its high refractive index, large transparency window and high non-linear refractive index. Its low phonon energy makes it attractive for the realization of active devices in the visible frequency range. In this work, we optimize different process steps of the fabrication of low loss TiO 2 channel waveguides. The TiO 2 layers are deposited by DC sputter deposition, using a mixed Ar/O 2 plasma. Removing the hysteresis in the deposition process, results in reduced propagation losses of the TiO 2 films (estimated less than 1.5 dB/cm at 632 nm wavelength). An E-beam lithography process is utilized to reduce the sidewall roughness of the waveguides. Different reactive gasses are compared to optimize the reactive ion etching recipe. BCl 3 in combination with HBr shows to be most beneficial for etching TiO 2 with high selectivity towards negative E-beam resist. A selectivity of 2.7 for TiO 2 over the E-beam resist is obtained. The performance of a TiO 2 a channel waveguide fabricated with the process before and after optimization is compared. The waveguide fabricated using the non-optimized process exhibited losses of 7.82±0.52 dB/cm at a wavelength of 632.8 nm, after applying an SiO 2 cladding. After process optimization, 5.08±0.65 dB/cm were obtained, without an SiO 2 cladding.

show abstract

Reactive Ion etching of TiO2 thin film: The impact of different gaseous

Cited by 5 publications

References 15 publications

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Direct Functionalization of TiO₂/PSS Sensing Layer for an LMR-Based Optical Fiber Reusable Biosensor

Low loss TiO2 channel waveguides

Contact Info

Product

Resources

About

Reactive Ion etching of TiO2 thin film: The impact of different gaseous

Cited by 5 publications

References 15 publications

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Direct Functionalization of TiO2/PSS Sensing Layer for an LMR-Based Optical Fiber Reusable Biosensor

Low loss TiO2 channel waveguides

Contact Info

Product

Resources

About

Direct Functionalization of TiO₂/PSS Sensing Layer for an LMR-Based Optical Fiber Reusable Biosensor