Abstract:TiO 2 is gaining interest as material for integrated photonics, due to its high refractive index, large transparency window and high non-linear refractive index. Its low phonon energy makes it attractive for the realization of active devices in the visible frequency range. In this work, we optimize different process steps of the fabrication of low loss TiO 2 channel waveguides. The TiO 2 layers are deposited by DC sputter deposition, using a mixed Ar/O 2 plasma. Removing the hysteresis in the deposition proces… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.