Reactive ion etching of GaAs using BCl3

Sonek, G. J.; Ballantyne, J. M.

doi:10.1116/1.582857

Cited by 31 publications

(24 citation statements)

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“…The prominent bands near 357.1 and 351.6 nm exhibit appropriate isotope shifts indicating assignments as electronic origins. The isotope shifts are calculated using eqs [1][2][3][4][5]17 where µ is the reduced mass of 11 B 35 Cl (8.373167 u) and µ i is the reduced mass of the other isotope: 10 B 35 Cl (7.784059 u), 10 B 37 Cl (7.878808 u), or 11 B 37 Cl (8.482900 u).…”

Section: Resultsmentioning

confidence: 99%

Electronic Structure of BCl Determined by Ab Initio Calculations and Resonance-Enhanced Multiphoton Ionization Spectroscopy

2000

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The mass-resolved, one-color, 2 + 1 resonance-enhanced multiphoton ionization spectrum of transient boron monochloride (BCl) between 348 and 369 nm is reported. Vibrational and rotational bands of the 10 B 35 Cl, 11 B 35 Cl, 10 B 37 Cl, and 11 B 37 Cl isotopomers and two previously unreported electronic states are assigned. Rotational analysis identifies the F 1 Σ + (3sσ) state (ν 00 ) 55994 ( 10 cm -1 for 11 B 35 Cl). EE-EOM-CCSD ab initio calculations for BF and BCl support the F state assignment and suggest a tentative assignment of b 3 Σ + (3pσ) (ν 00 ) 56864 ( 10 cm -1 for 11 B 35 Cl). Uncertainties indicate the confidence of two standard deviations.

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Section: Resultsmentioning

confidence: 99%

Electronic Structure of BCl Determined by Ab Initio Calculations and Resonance-Enhanced Multiphoton Ionization Spectroscopy

2000

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“…2f and 2g). Indeed, Cl 2 guarantees an efficient chemical etching of GaAs, whilst BCl 3 provides a good sidewall surface inhibition and Ar spattering removes the products of the reaction from the bottom of the holes, keeping the etching process active and homogenous [10,11,12]. At the end of the dry etching the residual resist is removed by a wet etching in hot anisole.…”

Section: Phc Cavity Fabricationmentioning

confidence: 99%

A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides

Pettinari

Gerardino

Businaro

et al. 2017

Microelectronic Engineering

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ReuseThis article is distributed under the terms of the Creative Commons Attribution-NonCommercial-NoDerivs (CC BY-NC-ND) licence. This licence only allows you to download this work and share it with others as long as you credit the authors, but you can't change the article in any way or use it commercially. More information and the full terms of the licence here: https://creativecommons.org/licenses/ We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate sitecontrolled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized sitecontrolled QDs with PhC nanocavities is provided by the inherent realignment precision (~20 nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity.

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“…29,30 The presence of these unoccupied molecular orbitals helps explain the observed negative ion states of the BCl 3 molecule, and consequently the observed or calculated structure in the electron scattering and electron attachment cross sections. A detailed calculation by Baeck and Bartlett 29 -optimizing bond lengths and bond angles within D 3h symmetry for BCl 3 and C 3v symmetry for BCl 3 Ϫ -provided a number of structural and electronic parameters such as ionization energies, electronic vertical excitation energies, and vibrational frequencies for the BCl 3 , BCl 3 Ϫ , BCl 3 ϩ species. 29 A number of experimental studies contribute to an understanding of the molecular and electronic structure of the BCl 3 molecule.…”

Section: Structural and Electronic Propertiesmentioning

confidence: 99%

“…1-7͒. BCl 3 is used in a variety of gas mixtures ͑i.e., BCl 3 mixed with Ar, N 2 , Cl 2 , SF 6 , CF 4 , CHF 3 , ArϩO 2 , ArϩCl 2 , ArϩCCl 2 F 2 , ArϩSF 6 , ArϩH 2 ϩN 2 , SiCl 4 ϩH 2 , and ArϩCl 2 ϩN 2 ) for the etching of GaAs, GaSb, GaN, GaP, InAs, InP, AlGaAs, AlGaP, AlGaN, AlInAs, AlInP, InGaAs, InGaP, InAlP, InAlN, NiMnSb, and InGaAsP ͑e.g., see Refs. 7-13͒.…”

Section: Introductionmentioning

confidence: 99%

Electron Interactions With BCl3

Christophorou

Olthoff

2002

Journal of Physical and Chemical Reference Data

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In this paper we review and assess the cross sections for collisions of low-energy electrons with boron trichloride (BCl 3 ). The only available experimental cross section data are for partial and total ionization and electron attachment, and the electron attachment cross sections are uncertain. Calculated values are available for the total elastic, differential elastic, and momentum transfer cross sections, and derived cross sections have been published for vibrational excitation and dissociation. Other than some rather uncertain data on electron attachment rate constants and some measurements of electron drift velocities in BCl 3 /Ar and BCl 3 /He mixtures, there are no measurements of the electron attachment, ionization, or transport coefficients for this gas. Analysis of the experimental data on the electron affinity, electron attachment, and electron scattering, enabled identification of negative ion states of BCl 3 at about Ϫ0.3, 1.0, 2.8, 5.2, 7.6, and 9.0 eV. Because the existing electron collision data are few and uncertain, relevant data are provided for photon impact on BCl 3 .

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Reactive ion etching of GaAs using BCl3

Cited by 31 publications

References 0 publications

Electronic Structure of BCl Determined by Ab Initio Calculations and Resonance-Enhanced Multiphoton Ionization Spectroscopy

Electronic Structure of BCl Determined by Ab Initio Calculations and Resonance-Enhanced Multiphoton Ionization Spectroscopy

A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides

Electron Interactions With BCl3

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