Reactive ion beam etching-based planarization of optical aluminium surfaces

Ulitschka, Melanie; Bauer, Jens; Frost, Frank; Arnold, Thomas

doi:10.1117/12.2513670

Cited by 1 publication

(3 citation statements)

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“…Due to the ion incidence angle dependent sputter erosion described by Carter et al [14][15][16][17] and a detailed discussion of the microroughness evolution during the interaction of a low-energy ion beam with an Al905 surface described in a previous study [11,18], surface areas with high slopes show an enhanced removal rate resulting in a gradually smoothing of these roughness features. These results are in good agreement with the roughness evolution illustrated in Fig.…”

Section: Ribe Finishing With Oxygenmentioning

confidence: 95%

“…Further investigations on aluminium smoothing of microroughness features with oxygen suggest a model scheme based on the incidence angle-dependent local sputter erosion [11,[13][14][15][16][17]. Thus, surface microroughness features with high slopes are gradually smoothed during processing [11,18].…”

Section: Introductionmentioning

confidence: 99%

“…Increasing demands on accuracy of surface quality for applications in the shortwavelength range claim improved ultra-precise surface machining techniques. Reactive ion beam etching (RIBE) is one promising surface machining technique to improve figure accuracy and surface finish [8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

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Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Ulitschka

Bauer

Frost

et al. 2021

J. Eur. Opt. Soc.-Rapid Publ.

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Ion beam finishing techniques of aluminium mirrors have a high potential to meet the increasing demands on applications of high-performance mirror devices for visible and ultraviolet spectral range. Reactively driven ion beam machining using oxygen and nitrogen gases enables the direct figure error correction up to 1 μm machining depth while preserving the initial roughness. However, the periodic turning mark structures, which result from preliminary device shaping by single-point diamond turning, often limit the applicability of mirror surfaces in the short-periodic spectral range. Ion beam planarization with the aid of a sacrificial layer is a promising process route for surface smoothing, resulting in successfully reduction of the turning mark structures. A combination with direct surface smoothing to perform a subsequent improvement of the microroughness is presented with a special focus on roughness evolution, chemical composition, and optical surface properties. As a result, an ion beam based process route is suggested, which allows almost to recover the reflective properties and an increased long-term stability of smoothed aluminium surfaces.

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