The growth of titania nanowires by a simple metal oxidation process was investigated for both commercially pure α-Ti and Ti alloys including Ti64 and β-Ti under a limited supply of oxygen. The effects of processing variables including heat treatment temperature, gas flow rate, and process duration on the growth of nanowires were explored. Similarities and differences in the growth of nanowires on pure Ti versus Ti alloys were observed. While the growth window in terms of temperature and flow rate is narrow in pure Ti, the window is much wider in the alloys. However, the trend towards high temperature is similar in all the samples promoting faceted oxide crystal growth rather than nanowires.