Reactive Intermediates 1982
DOI: 10.1007/978-1-4613-3192-6_4
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Reactions of Silicon Atoms and Silylenes

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Cited by 33 publications
(3 citation statements)
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“…SiH 2 is an important intermediate in the chemistry of silicon hydrides and organosilicon compounds. 19,20 It plays a major role in thermally initiated chemical vapour deposition (CVD) processes used for generating high quality films of amorphous Si, SiO, or SiN. 21,22 The kinetics of numerous elementary reactions of SiH 2 have been comprehensively reviewed by Jasinski, Becerra, and Walsh.…”
Section: Introductionmentioning
confidence: 99%
“…SiH 2 is an important intermediate in the chemistry of silicon hydrides and organosilicon compounds. 19,20 It plays a major role in thermally initiated chemical vapour deposition (CVD) processes used for generating high quality films of amorphous Si, SiO, or SiN. 21,22 The kinetics of numerous elementary reactions of SiH 2 have been comprehensively reviewed by Jasinski, Becerra, and Walsh.…”
Section: Introductionmentioning
confidence: 99%
“…Heating and optical irradiation of hydrosilane results in cleavage of the relatively weak intrachain Si–Si bond, thereby leading to silylene‐type radicals . The radicals are ground‐state singlets, and their characteristic reactions include insertion into Si–H bonds and π‐type addition across C=C and C≡C bonds . In the present case, these generated radicals react with unsaturated bonds in 1‐hexyne and a Si–H bond in CPS.…”
Section: Resultsmentioning
confidence: 78%
“…SiH 2 radicals are important intermediates in the chemistry of silicon hydrides and organosilicon compounds, and the reactions of SiH 2 with saturated and unsaturated hydrocarbons have practical significance for modeling chemical vapor deposition (CVD) processes. In contrast to CH 2 , for which the chemistry is complicated by the interplay of a less reactive triplet ground state and an energetically low-lying reactive singlet state, SiH 2 reactions are dominated by its singlet ground state ( 1 A 1 ) . A considerable set of SiH 2 reaction rate constants, mostly based on time-resolved measurements of SiH 2 concentration profiles, already exist and have been reviewed by Walsh and co-workers , and more recently were updated and compared with available data for other heavy carbenes by Becerra and Walsh .…”
Section: Introductionmentioning
confidence: 99%