Rapid micromachining of high aspect ratio holes in fused silica glass by high repetition rate picosecond laser

Heat accumulation in microdrilled glass from ultraviolet laser ablation

“…The laser beam can be focused through the bulk sample onto the rear surface and hence the beam energy can be transferred to the rear surface [19][20][21]. Microchannel forming in glass using a focused femtosecond laser beam and selective chemical etching has been reported [10,22]. In contrast, deep drilling from the front surface has had less attention as such drilling is difficult to achieve.…”

“…Weber et al [8] studied the geometry of the laser heat source and temperature fields comparing three-dimensional and one-dimensional heat flows using the results obtained from microhole drilling of stainless steel and the cutting of anisotropic materials, e.g., carbon fiber-reinforced plastics (CFRP). Many studies on heat accumulation in glass have been reported [9][10][11][12][13]; the transparency of glass enables inside focusing and modification induced by ultrafast laser illumination. The modification can be applied for machining after etching [10], waveguide formation [11], and welding [12,13].…”

Picosecond ultrafast pulsed laser deposition of SrTiO3

“…While 1-2 nanosecond and picosecond high repetition rate laser micromachining has been proven a very useful tool because of the limited thermally affected zone and debris near the ablated area [14][15][16], there is only a limited number of reports on the picosecond high repetition rate PLD of oxides.…”

High-precision Helical Cutting Using Ultra-short Laser Pulses

“…Mechanism and technics of material removing and ablation for micro and nano-processing, especially microdrilling and structuring applications, using ultra-short pulses laser irradiation have been intensively studied in recent years [3][4][5][6][7] . One of the most efficient and accurate drilling technology namely helical drilling was reported a few years ago [8] .…”