Rapid manufacturing of SiC molds with micro-sized holes using abrasive water jet

Shin, Bo-Sung; Park, Kang-Su; Bahk, Yeon-Kyoung; Park, Sun-Ki; Lee, Jung-Han; Go, Jeung-Sang; Kang, Myung Chang; Lee, Chae-Moon

doi:10.1016/s1003-6326(10)60267-1

Cited by 11 publications

(3 citation statements)

References 7 publications

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“…Kim et al [18] have reported the fabrication of a microscale hole/mold with circular structure on a silicon substrate. Shin et al [19] have developed 3 × 3 array of micro-holes on the surface of a SiC with optimal experimental conditions with hole diameter of 700 μm and depth of 900 μm. Chang [20] has studied hybrid stamping and laser micro-machining process for microscale hole drilling up to 100 µm as diameter.…”

Section: Introductionmentioning

confidence: 99%

Effect and optimization of photochemical machining process parameters for manufacturing array of micro-hole

Agrawal

Kamble

2019

J Braz. Soc. Mech. Sci. Eng.

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The stainless steel-304 is used in various surgical instruments due to its low carbon content and better corrosion resistance. SS-304 is machined using photochemical machining process (PCM) to obtain the components with micro-dimensions. The statistical methods of signal-to-noise (S/N) ratio and the analysis of variance (ANOVA) are applied to investigate effect of concentration of etchant, time of etching and temperature of etchant using DoE (L 27) orthogonal array. The performance characteristics like material removal rate (MRR), surface roughness (R a), undercut (U C) and etch factor (EF) are optimized during the investigation. The ANOVA technique is used to evaluate significance and percentage contribution of each parameter. The regression model for PCM of SS-304 is developed. The ANN technique is used to compare the predicted and experimental results of machining. The MRR, R a , EF and U C are showing improvement of 0.38 mm 3 /min, 1.271 µm, 0.11 and 0.028 mm, respectively, after the confirmatory test. The developed model is used to manufacture the array of micro-holes (5 × 5) with hole size of 220 µm, 280 µm and 370 µm which are used for metering of medicine in biomedical applications.

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Section: Introductionmentioning

confidence: 99%

Effect and optimization of photochemical machining process parameters for manufacturing array of micro-hole

Agrawal

Kamble

2019

J Braz. Soc. Mech. Sci. Eng.

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“…Park et al machined micro grooves on glass with micro abrasive water jets [5]. Shin et al also used micro AWJ to create micro holes a few hundreds of microns in diameter on silicon carbide, which is a highly wear resistant material with excellent mechanical properties [6]. Pang et al machined microchannels on glass by an abrasive slurry water jet process [7].…”

Section: Introductionmentioning

confidence: 99%

Response of High-Pressure Micro Water Jets to Static and Dynamic Nonuniform Electric Fields

Shi

Cao

Ehmann

2018

Journal of Micro and Nano-Manufacturing

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The manipulation of the trajectory of high-pressure micro water jets has the potential to greatly improve the accuracy of water jet related manufacturing processes. An experimental study was conducted to understand the basic static and dynamic responses of high-pressure micro water jet systems in the presence of nonuniform electric fields. A single electrode was employed to create a nonuniform electric field to deflect a high-pressure micro water jet toward the electrode by the dielectrophoretic force generated. The water jet's motions were precisely recorded by a high-speed camera with a 20× magnification and the videos postprocessed by a LabVIEW image processing program to acquire the deflections. The experiments revealed the fundamental relationships between three experimental parameters, i.e., voltage, pressure, and the distance between the water jet and the electrode and the deflection of the water jet in both nonuniform static and dynamic electric fields. In the latter case, electric signals at different frequencies were employed to experimentally investigate the jet's dynamic response, such as response time, frequency, and the stability of the water jet's motion. A first-order system model was proposed to approximate the jet's response to dynamic input signals. The work can serve as the basis for the development of closed-loop control systems for manipulating the trajectory of high-pressure micro water jets.

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“…Micro-structured optical components made of glasses are promisingly replicated by glass molding with mold material such as silicon carbide (SiC) because of its high wear resistance, high temperature resistance, and high thermal conductivity. 1,2 However, high-quality micro-structured surface on SiC molds is quite difficult to obtain directly by ultraprecision grinding attributed to those superb material property, [3][4][5] thus these microstructured surfaces on SiC have to be finished by lapping or polishing after grinding. While conventional abrasive polishing (AP) is usually used for soft materials such as mold steels, which is very difficult for SiC because of the high hardness and high strength.…”

Section: Introductionmentioning

confidence: 99%

Ultrasonic vibration–assisted polishing of cylindrical groove arrays on silicon carbide

Sun

Guo

Zhao

et al. 2014

Proceedings of the Institution of Mechanical Engineers, Part B:

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Thanks to its superior mechanical and physical properties, silicon carbide is a promising mold material in glass molding of micro-structured optical elements. However, the high micro-structured surface quality can be hardly generated by means of conventional abrasive polishing because of the high hardness of silicon carbide. In this article, the ultrasonic vibration was introduced to assist abrasive polishing with an aim to improve the cylindrical groove arrays’ surface quality and also to increase the polishing efficiency. First, the comparison experiments between abrasive polishing and ultrasonic vibration–assisted polishing were conducted, and then, the factors affecting ultrasonic vibration–assisted polishing performance were investigated. The experimental results indicate that through conventional abrasive polishing, the surface roughness of silicon carbide cylindrical groove arrays decreases to 25.5 nm from the precision ground surface roughness ( Ra) of 115.6 nm, while through ultrasonic vibration–assisted polishing, the surface roughness decreases to 8.6 nm with a factor of three times improvement. Furthermore, a 35-kHz vibration frequency corresponds to a smaller surface roughness than a 25-kHz vibration frequency under identical processing parameters. In the vibration amplitude range from 1.0 to 2.5 µm, the surface roughness accordingly decreases linearly, while in the range of 2.5–4.0 µm, ultrasonic vibration presents no assistance in improving the surface quality.

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Rapid manufacturing of SiC molds with micro-sized holes using abrasive water jet

Cited by 11 publications

References 7 publications

Effect and optimization of photochemical machining process parameters for manufacturing array of micro-hole

Effect and optimization of photochemical machining process parameters for manufacturing array of micro-hole

Response of High-Pressure Micro Water Jets to Static and Dynamic Nonuniform Electric Fields

Ultrasonic vibration–assisted polishing of cylindrical groove arrays on silicon carbide

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