Rapid fabrication of on-demand high-resolution optical masks with a CD–DVD pickup unit

Cabriales, Lucia; Hautefeuille, Mathieu; Fernández, Gerardo; Velázquez, Víctor; Grether, M.; López‐Moreno, Enrique

doi:10.1364/ao.53.001802

Cited by 8 publications

(2 citation statements)

References 11 publications

(13 reference statements)

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“…However, they have high-cost fabrication [14]. Several authors have conducted studies where inexpensive photomasks are used in order to reduce the overall costs of the photomasks fabrication (including facilities) and, consequently, of the photolithographic processes [15,16]. Despite portraying the need for low-cost technologies these approaches use specific equipment and relatively complex processes.…”

Section: Uv Exposurementioning

confidence: 99%

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

et al. 2014

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Abstract:The study and optimization of epoxy-based negative photoresist (SU-8) microstructures through a low-cost process and without the need for cleanroom facility is presented in this paper. It is demonstrated that the Ultraviolet Rays (UV) exposure equipment, commonly used in the Printed Circuit Board (PCB) industry, can replace the more expensive and less available equipment, as the Mask Aligner that has been used in the last 15 years for SU-8 patterning. Moreover, high transparency masks, printed in a photomask, are used, instead of expensive chromium masks. The fabrication of well-defined SU-8 microstructures with aspect ratios more than 20 is successfully demonstrated with those facilities. The viability of using the gray-scale technology in the photomasks for the fabrication of 3D microstructures is also reported. Moreover, SU-8 microstructures for different applications are shown throughout the paper.

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Section: Uv Exposurementioning

confidence: 99%

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

et al. 2014

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“…It is interesting to remark that the depth of the ablated patterns is typically lower than what is obtained with direct PDMS/CNP coatings, reaching a maximum of 10 µm in the best case, as observed with a KLA-Tencor D600 profilometer. In addition, the optically absorbing layer is fully removed after etching, offering a great optical contrast between transparent and opaque areas for the development of optical masks, improving our previously reported results [41]. However, one disadvantage of this technique compared to that presented in [12] is that it is impossible to wash the residual CNP after the etching process; this limits its use for samples that do not require optical transparency around laser-etched micropatterns.…”

Section: Resultsmentioning

confidence: 91%

Photothermal Effects and Applications of Polydimethylsiloxane Membranes with Carbon Nanoparticles

et al. 2016

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Abstract:The advent of nanotechnology has triggered novel developments and applications for polymer-based membranes with embedded or coated nanoparticles. As an example, interaction of laser radiation with metallic and carbon nanoparticles has shown to provide optically triggered responses in otherwise transparent media. Incorporation of these materials inside polymers has led to generation of plasmonic and photothermal effects through the enhanced optical absorption of these polymer composites. In this work, we focus on the photothermal effects produced in polydimethylsiloxane (PDMS) membranes with embedded carbon nanoparticles via light absorption. Relevant physical parameters of these composites, such as nanoparticle concentration, density, geometry and dimensions, are used to analyze the photothermal features of the membranes. In particular, we analyze the heat generation and conduction in the membranes, showing that different effects can be achieved and controlled depending on the physical and thermal properties of the composite material. Several novel applications of these light responsive membranes are also demonstrated, including low-power laser-assisted micro-patterning and optomechanical deformation. Furthermore, we show that these polymer-nanoparticle composites can also be used as coatings in photonic and microfluidic applications, thereby offering an attractive platform for developing light-activated photonic and optofluidic devices.

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Biomedical microfluidic devices by using low-cost fabrication techniques: A review

Faustino

Catarino

Lima

et al. 2016

Journal of Biomechanics

265

200

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One of the most popular methods to fabricate biomedical microfluidic devices is by using a soft-lithography technique. However, the fabrication of the moulds to produce microfluidic devices, such as SU-8 moulds, usually requires a cleanroom environment that can be quite costly. Therefore, many efforts have been made to develop low-cost alternatives for the fabrication of microstructures, avoiding the use of cleanroom facilities. Recently, low-cost techniques without cleanroom facilities that feature aspect ratios more than 20, for fabricating those SU-8 moulds have been gaining popularity among biomedical research community. In those techniques, Ultraviolet (UV) exposure equipment, commonly used in the Printed Circuit Board (PCB) industry, replaces the more expensive and less available Mask Aligner that has been used in the last 15 years for SU-8 patterning. Alternatively, non-lithographic low-cost techniques, due to their ability for large-scale production, have increased the interest of the industrial and research community to develop simple, rapid and low-cost microfluidic structures. These alternative techniques include Print and Peel methods (PAP), laserjet, solid ink, cutting plotters or micromilling, that use equipment available in almost all laboratories and offices. An example is the xurography technique that uses a cutting plotter machine and adhesive vinyl films to generate the master moulds to fabricate microfluidic channels. In this review, we present a selection of the most recent lithographic and non-lithographic low-cost techniques to fabricate microfluidic structures, focused on the features and limitations of each technique. Only microfabrication methods that do not require the use of cleanrooms are considered. Additionally, potential applications of these microfluidic devices in biomedical engineering are presented with some illustrative examples.

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Rapid fabrication of on-demand high-resolution optical masks with a CD–DVD pickup unit

Cited by 8 publications

References 11 publications

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

Photothermal Effects and Applications of Polydimethylsiloxane Membranes with Carbon Nanoparticles

Biomedical microfluidic devices by using low-cost fabrication techniques: A review

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