2014
DOI: 10.3390/mi5030738
|View full text |Cite
|
Sign up to set email alerts
|

Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities

Abstract: Abstract:The study and optimization of epoxy-based negative photoresist (SU-8) microstructures through a low-cost process and without the need for cleanroom facility is presented in this paper. It is demonstrated that the Ultraviolet Rays (UV) exposure equipment, commonly used in the Printed Circuit Board (PCB) industry, can replace the more expensive and less available equipment, as the Mask Aligner that has been used in the last 15 years for SU-8 patterning. Moreover, high transparency masks, printed in a ph… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
53
0

Year Published

2015
2015
2023
2023

Publication Types

Select...
9
1

Relationship

1
9

Authors

Journals

citations
Cited by 99 publications
(54 citation statements)
references
References 20 publications
1
53
0
Order By: Relevance
“…Low cost approaches to produce photolithography masks have been reported in the literature, 17,18 mainly by the use of overhead transparency. Although such transparent sheets are inexpensive, the high resolution laser printer is not and the minimum resolution is $10 lm.…”
Section: Discussionmentioning
confidence: 99%
“…Low cost approaches to produce photolithography masks have been reported in the literature, 17,18 mainly by the use of overhead transparency. Although such transparent sheets are inexpensive, the high resolution laser printer is not and the minimum resolution is $10 lm.…”
Section: Discussionmentioning
confidence: 99%
“…More detail about the fabrication technique can be found elsewhere [7,8]. Figure 1 shows the main dimensions of the microfluidic device used in this study.…”
Section: Microchannel Fabrication and Geometrymentioning
confidence: 99%
“…SU-8 is commonly used as a mold for microstructures fabrication, since it is compatible with ultraviolet (UV) photolithography and does not imply expensive masks. It is typically processed through spin coating techniques, and presents good mechanical properties, good chemical resistance and a very good biocompatibility [39][40][41]. PDMS is a polymer widely used in microstructures due, mainly, to its low cost processing techniques [29].…”
Section: Acoustic Transmission In the Interfacesmentioning
confidence: 99%