Rapid fabrication of nanoporous membrane arrays and single-pore membranes from parylene C

Thakar, Rahul; Zakeri, Rashid; Morris, Celeste A.; Baker, Lane A.

doi:10.1039/c2ay26074c

Cited by 10 publications

(5 citation statements)

References 63 publications

(61 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A similar process was used to construct HAR Parylene beams to create suspended structures that are capable of large in‐plane displacement . The conformal deposition of Parylene onto molds was also manipulated to coat copper mesh or micro‐aperture grids to produce micropore membranes by ceasing the deposition of Parylene prior to covering the each cell of the grid …”

Section: Fabrication Techniquesmentioning

confidence: 99%

Micromachining of Parylene C for bioMEMS

Kim

Meng

2015

Polym. Adv. Technol.

164

View full text Add to dashboard Cite

Recent advances in the micromachining of poly(p-xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (poly[chloro-p-xylylene]) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, and many advantageous properties including its chemical inertness, optical transparency, flexibility, and mechanical strength. Here we present a review of often used and recently developed micromachining process for Parylene C, as well as a high-level overview of state-of-the-art Parylene hybrid and free film devices for biomedical MEMS (bioMEMS) applications, including a discussion on its challenges and potential as a MEMS material.

show abstract

Section: Fabrication Techniquesmentioning

confidence: 99%

Micromachining of Parylene C for bioMEMS

Kim

Meng

2015

Polym. Adv. Technol.

164

View full text Add to dashboard Cite

show abstract

“…Therefore, membranes that can be deposited in situ would greatly reduce the need for handling of the membranes. For example, parylene is a biocompatible polymer that can be vapor deposited and patterned using shadow masks or reactive ion etching. − It has also been shown that mesh supported parylene membranes are suitable for adherence and proliferation of retinal pigment epithelial (RPE) cells . Parylene is also sufficiently elastic to facilitate cyclic inflation and deflation of the membranes .…”

Section: Parameters In Developing An Ideal Loc Platformmentioning

confidence: 99%

Advances and Challenges in Recapitulating Human Pulmonary Systems: At the Cusp of Biology and Materials

Bajaj

Harris

Nath

et al. 2016

ACS Biomater. Sci. Eng.

View full text Add to dashboard Cite

The aim of this review is to provide an overview of physiologically relevant microengineered lung-on-a-chip (LoC) platforms for a variety of different biomedical applications with emphasis on drug screening. First, a brief outline of lung anatomy and physiology is presented followed by discussion of the lung parenchyma and its extracellular matrix. Next, we point out the technical challenges in recapitulating the complexity of lung in conventional static two-dimensional microenvironments and the need for alternate lung platforms. The importance of scaling laws is also emphasized in designing these in vitro microengineered lung platforms. The review then discusses current LoC platforms that have been used for testing the efficacy of drugs or as model systems for investigating disorders of the lung parenchyma. Finally, the design parameters in developing an ideal physiologically relevant LoC platform are presented. As this emerging field of organ-on-a-chip can serve an alternative platform for animal testing of drugs or modeling human diseases in vitro, it has significant potential to impact the future of pharmaceutical research.

show abstract

“…The parylene deposition procedure has been explained in detail elsewhere. 51,54 Briey, pulled quartz rods and nanopipettes were placed inside the parylene deposition chamber in an upright position and $35 pipettes were coated in a given run. For parylene lm thickness of $1 mm on quartz, 1.3 g of DCP dimer was used to uniformly coat the pipettes with parylene.…”

Section: Instrumentationmentioning

confidence: 99%

“…Fabrication of single-pore parylene membranes has been described in detail elsewhere. 54 A single-pore parylene membrane was sealed inside a tape-mask and placed within a perfusion cell. Initially, the bottom and top chambers contained 1.25 mM FcTMA + solution and the coneshaped electrode was approached to the membrane surface.…”

Section: Secm Imaging With Conical Carbon Electrodesmentioning

confidence: 99%

Multifunctional carbon nanoelectrodes fabricated by focused ion beam milling

Thakar

Weber

Morris

et al. 2013

Analyst

Self Cite

View full text Add to dashboard Cite

We report a strategy for fabrication of sub-micron, multifunctional carbon electrodes and application of these electrodes as probes for scanning electrochemical microscopy (SECM) and scanning ion conductance microscopy (SICM). The fabrication process utilized chemical vapor deposition of parylene, followed by thermal pyrolysis to form conductive carbon and then further deposition of parylene to form an insulation layer. To achieve well-defined electrode geometries, two methods of electrode exposure were utilized. In the first method, carbon probes were masked in polydimethylsiloxane (PDMS) to obtain a cone-shaped electrode. In the second method, the electrode area was exposed via milling with a focused ion beam (FIB) to reveal a carbon ring electrode, carbon ring/platinum disk electrode, or carbon ring/nanopore electrode. Carbon electrodes were batch fabricated (~35/batch) through the vapor deposition process and were characterized with scanning electron microscopy (SEM), scanning transmission electron microscopy (STEM), and cyclic voltammetry (CV) measurements. Additionally, Raman spectroscopy was utilized to examine the effects of Ga(+) ion implantation, a result of FIB milling. Constant-height, feedback mode SECM was performed with conical carbon electrodes and carbon ring electrodes. We demonstrate the utility of carbon ring/nanopore electrodes with SECM-SICM to simultaneously collect topography, ion current and electrochemical current images. In addition, carbon ring/nanopore electrodes were utilized in substrate generation/tip collection (SG/TC) SECM. In SG/TC SECM, localized delivery of redox molecules affords a higher resolution, than when the redox molecules are present in the bath solution. Multifunctional geometries of carbon electrode probes will find utility in electroanalytical applications, in general, and more specifically with electrochemical microscopy as discussed herein.

show abstract

Rapid fabrication of nanoporous membrane arrays and single-pore membranes from parylene C

Cited by 10 publications

References 63 publications

Micromachining of Parylene C for bioMEMS

Micromachining of Parylene C for bioMEMS

Advances and Challenges in Recapitulating Human Pulmonary Systems: At the Cusp of Biology and Materials

Multifunctional carbon nanoelectrodes fabricated by focused ion beam milling

Contact Info

Product

Resources

About