Micromachining of Parylene C for bioMEMS

Abstract

Recent advances in the micromachining of poly(p-xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (poly[chloro-p-xylylene]) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, and many advantageous properties including its chemical inertness, optical transparency, flexibility, and mechanical strength. Here we present a review of often used and recently developed micromachining process for Parylene C, as well as a high-level overview of state-of-the-art Parylene hybrid and free film devices for biomedical MEMS (bioMEMS) applications, including a discussion on its challenges and potential as a MEMS material.

Integration of Thick-Film Permanent Magnets for MEMS Applications

“…This paper demonstrates a new binding technique that combines Parylene N and Parylene C films in order to gain increased crevice penetration. Parylene N can penetrate smaller crevices than Parylene C due to its higher level of molecular activity during deposition [31]. Four different permanent magnet powder deposition methods were investigated, in order to optimize the fill factor and increase film uniformity.…”

Lab-on-Chip Platform for Culturing and Dynamic Evaluation of Cells Development

“…In order to improve PDMS biocompatibility, a visible tendency to use special layers, for example, Parylene, Kraton, or hydrogel-based layers, has been observed [23][24][25][26]. Nevertheless, these solutions are still rather PoC (Proof of Concept), requiring advanced technology and dependable statistics to achieve fully-featured cell culturing platforms.…”

Distinct modes in the evolution of interaction between polymer film and atmospheric pressure plasma jet

“…However, temporal and spatial processes of surface treatment by APPJ are still ambiguous, especially for various polymer film treatments with a substrate. Different kinds of polymer films, such as photoresist, polyimide, parylene‐C, etc, are widely used in the field of micro‐electro mechanical systems (MEMS), and biomedicine . In the application and micromaching of these polymer materials, films are usually spin coated or deposited on different substrates, such as conductive, semiconductive or dielectric materials .…”

“…Different kinds of polymer films, such as photoresist, polyimide, parylene-C, etc, are widely used in the field of micro-electro mechanical systems (MEMS), [17,18] and biomedicine. [19,20] In the application and micromaching of these polymer materials, films are usually spin coated or deposited on different substrates, such as conductive, semiconductive or dielectric materials. [3,4,[17][18][19][20] As a result, the influence of polymer films with different substrates will also affect the plasma characteristics and the treated films.…”

“…[19,20] In the application and micromaching of these polymer materials, films are usually spin coated or deposited on different substrates, such as conductive, semiconductive or dielectric materials. [3,4,[17][18][19][20] As a result, the influence of polymer films with different substrates will also affect the plasma characteristics and the treated films. And the investigations on the temporal and spatial interaction processes between APPJ and various polymer film treatments with different substrates have not been found until now.…”