2013
DOI: 10.1039/c2lc40925a
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Rapid fabrication and piezoelectric tuning of micro- and nanopores in single crystal quartz

Abstract: We outline the fabrication of piezoelectric through-pores in crystalline quartz using a rapid micromachining process, and demonstrate piezoelectric deformation of the pore. The single-step fabrication technique combines ultraviolet (UV) laser irradiation with a thin layer of absorbing liquid in contact with the UV-transparent quartz chip. The effects of different liquid media are shown. We demonstrate that small exit pores, with diameters nearing the 193 nm laser wavelength and with a smooth periphery, can be … Show more

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Cited by 6 publications
(5 citation statements)
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“…49 Other than this, porous piezoelectric substrate (quartz) has also been adopted to control the size of nanopore using biasing voltage across the substrate. 50 First, laser excitation was adopted to generate pores in the quartz whose sizes can be fine-tuned from hundreds of nanometers to tens of micrometers. Biasing voltage was then applied on the porous quartz, which can significantly enlarge the pore size through piezoelectric deformation.…”
Section: Resultsmentioning
confidence: 99%
“…49 Other than this, porous piezoelectric substrate (quartz) has also been adopted to control the size of nanopore using biasing voltage across the substrate. 50 First, laser excitation was adopted to generate pores in the quartz whose sizes can be fine-tuned from hundreds of nanometers to tens of micrometers. Biasing voltage was then applied on the porous quartz, which can significantly enlarge the pore size through piezoelectric deformation.…”
Section: Resultsmentioning
confidence: 99%
“…This value is larger than that of the unstrained N4 membrane (1.00 kg m –2 s –1 MPa –1 ), and it is fairly superior to that of a MoS 2 filter (∼0.987 kg m –2 s –1 MPa –1 , simulated) under similar conditions. In the laboratory, there are several strategies to apply strain to layered materials, which allow for the realization of strain on h-BN nanosheets.…”
Section: Results and Discussionmentioning
confidence: 99%
“…Since our procedure utilizes UV wavelengths, the laser parameters can be tuned to produce remarkably smaller pores. 23,30 Furthermore, tuning of the air-gap spacing and reective material could be used to enhance control over the crater-micropore structure, thereby tuning the system to the particular cell type under investigation.…”
Section: Discussionmentioning
confidence: 99%