Range and range straggling of ion-implanted boron in Cd0.2Hg0.8Te

Ryssel, H.; Müller, Karl; Biersack, J.P.; Krüger, Wilfried; Lang, G.; Jahnel, F.

doi:10.1002/pssa.2210570219

Cited by 11 publications

(1 citation statement)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Boron profiles by NDP in mercury cadmium telluride, an infrared detector material, have been measured by Ryssel et al [ 45 ], Vodopyanov et al [ 46 ], and Bowman [ 47 ]. Cervena et al [ 30 ] have used NDP to study the implantation profiles of 10 B in several photoresists used in masking operations and to determine range values for implants in several types of grown or deposited SiO 2 films.…”

Section: Applicationsmentioning

confidence: 99%

Neutron depth profiling: Overview and description of NIST facilities

Downing

Lamaze

Langland

et al. 1993

J. RES. NATL. INST. STAN.

125

View full text Add to dashboard Cite

The Cold Neutron Depth Profiling (CNDP) instrument at the NIST Cold Neutron Research Facility (CNRF) is now operational. The neutron beam originates from a 16 L D2O ice cold source and passes through a filter of 135 mm of single crystal sapphire. The neutron energy spectrum may be described by a 65 K Maxwellian distribution. The sample chamber configuration allows for remote controlled scanning of 150 × 150 mm sample areas including the varying of both sample and detector angle. The improved sensitivity over the current thermal depth profiling instrument has permitted the first nondestructive measurements of 17O profiles. This paper describes the CNDP instrument, illustrates the neutron depth profiling (NDP) technique with examples, and gives a separate bibliography of NDP publications.

show abstract

Section: Applicationsmentioning

confidence: 99%