2017
DOI: 10.1117/12.2259927
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Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing

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Cited by 1 publication
(2 citation statements)
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“…Raman spectroscopy is a powerful technique for identifying chemicals and characterizing materials. Obtained Raman spectra can provide insights into numerous properties, including morphology, stress/strain, crystallinity, doping level, conductivity, local temperature, and polarizability of a bulk, a thin film, or a nanostructure. Applications of Raman spectroscopy can be found in physical sciences, life sciences, drug discovery, and semiconductor technology .…”
Section: Introductionmentioning
confidence: 99%
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“…Raman spectroscopy is a powerful technique for identifying chemicals and characterizing materials. Obtained Raman spectra can provide insights into numerous properties, including morphology, stress/strain, crystallinity, doping level, conductivity, local temperature, and polarizability of a bulk, a thin film, or a nanostructure. Applications of Raman spectroscopy can be found in physical sciences, life sciences, drug discovery, and semiconductor technology .…”
Section: Introductionmentioning
confidence: 99%
“…Obtained Raman spectra can provide insights into numerous properties, including morphology, stress/strain, crystallinity, doping level, conductivity, local temperature, and polarizability of a bulk, a thin film, or a nanostructure. Applications of Raman spectroscopy can be found in physical sciences, life sciences, drug discovery, and semiconductor technology . As most materials have unique vibrational chemical fingerprints, this technique has major advantages over other material characterization techniques in that it is nondestructive, no sample preparation is needed, and finally, the required sample volume can be as small as few cubic microns, which is elementary for monolayers and single‐molecule detection.…”
Section: Introductionmentioning
confidence: 99%