Radio frequency driven slot micro-discharges operating in open air

Yalin, Azer P.; Rahman, Abdur; Moore, C. A.; Rahul, R.; Stan, O.; Zhang, Yu; Collins, G. J.

doi:10.1109/tps.2005.845135

Cited by 4 publications

(5 citation statements)

References 6 publications

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“…To minimize this quenching effect, the method to modify the reactor geometry 2-7 and the use of fast gas flow [8][9][10] were reported. This letter reports the improvement of plasma uniformity using ZnO-coated dielectric barrier and the experimental results about the improvement of discharge stability.…”

Section: Improvement Of Plasma Uniformity Using Zno-coated Dielectricmentioning

confidence: 99%

Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Choi

Lee

Han

et al. 2006

Applied Physics Letters

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The discharge behavior in atmospheric pressure dielectric barrier discharge using ZnO-coated dielectric layer is examined. ZnO thin film on alumina using rf magnetron sputter causes about a factor of a million higher surface conductivity than bare alumina surface. Experimental result shows that discharge uniformity is improved definitely in the case of ZnO-coated dielectric barrier discharge. Increase of surface conductivity stimulates charges to spread over the dielectric surface widely. These charge spreading enhances the uniformity and the stability of atmospheric pressure discharge in open air by initiation of consecutive streamers.

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Section: Improvement Of Plasma Uniformity Using Zno-coated Dielectricmentioning

confidence: 99%

Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Choi

Lee

Han

et al. 2006

Applied Physics Letters

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“…In addition to the described dc microtorches a number of rf or microwave driven miniature atmospheric pressure plasma jets have been described in the literature, like the "plasma needle" proposed by Stoffels and coworkers [51] at Eindhoven University of Technology and various "plasma pens" investigated by different institutions. Also thin flat linear jets in narrow slot arrangements (100-600 µm in width) and up to 35 cm length have been reported [52]. A multiple torch based on DBD technology (Fig.…”

Section: Microtorch Configurationsmentioning

confidence: 94%

Applications of Microplasmas and Microreactor Technology

Kogelschatz

2007

Contrib. Plasma Phys.

101

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During the last decade a number of microcavity plasma devices have been developed. Examples are microhollow cathode (MHC) discharges and cathode boundary layer (CBL) discharges proposed by Schoenbach, capillary plasma electrode (CPE) discharges proposed by Kunhardt and Becker, and micro-structured electrode arrays (MSEs) introduced by Gericke and Penache. Arrays of microplasmas based on silicon, ceramic, or metal/polymer structures were investigated by Eden, Frame, Park and coworkers. A breakthrough in the life expectancy of such devices was achieved when all metal electrodes were covered by dielectrics, thus combining dielectric-barrier discharge technology with microcavity plasma devices.The advantage of this technology is that large numbers of miniature atmospheric-pressure non-equilibrium discharges can be operated in parallel. Applications include emitters for visible and UV radiation, photodetectors, sensors, decontamination, surface modification, etching, film deposition, generation of nanoparticles. Operated in different gas mixtures many of these devices proved to be efficient emitters of ultraviolet excimer radiation. If a small gas flow is fed through these microplasmas applications for plasmachemical synthesis and pollution control become feasible. Novel applications are expected from the combination of microreactor technology with non-equilibrium plasma chemistry. Doping or coating of the dielectric surfaces results in additional catalytic effects.

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“…The RF discharge is most probably sustained between the RF driven wedge electrode and the surface of the slot electrode facing the wedge. With increasing current, arcing was reported 30. However, considering the pictures presented by Yalin et al30 and the experiences made with the APPJ, the discharge patterns are most probably a consequence of the occurrence of γ ‐mode 33.…”

Section: Alternative Sources Of Non‐equilibrium Plasmas At Atmospherimentioning

confidence: 95%

“…With increasing current, arcing was reported 30. However, considering the pictures presented by Yalin et al30 and the experiences made with the APPJ, the discharge patterns are most probably a consequence of the occurrence of γ ‐mode 33. It could be argued that this device is an APPJ with a very specific geometry.…”

Section: Alternative Sources Of Non‐equilibrium Plasmas At Atmospherimentioning

confidence: 95%

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Recent Advances in the Research on Non‐Equilibrium Atmospheric Pressure Plasma Jets

Laimer

Störi

2007

Plasma Processes & Polymers

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Recently, there has been increased interest in using atmospheric pressure plasmas for materials processing, since these plasmas do not require expensive vacuum systems. However, APGDs face instabilities. Therefore, special plasma sources have been developed to overcome this obstacle, which make use of DC, pulsed DC and AC ranging from mains frequency to RF. Recently, the APPJ was introduced, which features an α‐mode of an RF discharge between two bare metallic electrodes. Basically, three different geometric configurations have been developed. A characterization of the APPJs and their applications is presented.

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Radio frequency driven slot micro-discharges operating in open air

Cited by 4 publications

References 6 publications

Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Applications of Microplasmas and Microreactor Technology

Recent Advances in the Research on Non‐Equilibrium Atmospheric Pressure Plasma Jets

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