Radiation-induced conductivity in electron-beam irradiated insulating polymer films

Yang, G.M.; Sessler, G. M.

doi:10.1109/14.155808

Cited by 45 publications

(17 citation statements)

References 15 publications

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“…However, the calculated conductivity seems to be much higher than catalog values of ca 10 −14 Ω −1 m −1 . The increase in the conductivity by irradiation is well known as radiation‐induced conductivity (RIC)8. Since the calculated value of the above RIC is close to that obtained by Ynag and Sessler8, the measured electric field may be of propriety value.…”

Section: Discussionsupporting

confidence: 63%

Charge Accumulation in Various Electron‐Beam‐Irradiated Polymers

Nagasawa

Honjoh

Miyake

et al. 2010

IEEJ Transactions Elec Engng

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Charge accumulations in electron-beam (e-beam)-irradiated polymers are investigated by observing them using the pressure wave propagation method. The purpose of our research work is to measure the charge distribution in e-beam-irradiated dielectric materials for spacecrafts. We have been developing a system for measuring such a charge distribution in dielectric materials. Using this system, we tried to measure the charge distribution in various typical polymers (poly(ethylene terephthalate), polystyrene, low-density polyethylene) under e-beam irradiation. As a result, it is found that charging characteristics of insulating material is strongly influenced by the existence of benzene ring in the molecular architecture. 

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Section: Discussionsupporting

confidence: 63%

Charge Accumulation in Various Electron‐Beam‐Irradiated Polymers

Nagasawa

Honjoh

Miyake

et al. 2010

IEEJ Transactions Elec Engng

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“…Strong chemical bonds of PI macromolecules and the symmetry of benzene rings molecular chain cause the polymer to be very resistant to most of solvents and radiations [2]. PI has good electric properties and easy processing [3][4][5].…”

Section: Introductionmentioning

confidence: 99%

The use of the final thermally stimulated discharge current technique to study the molecular movements around glass transition

Neagu

Dias

Lança

et al. 2011

Journal of Non-Crystalline Solids

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“…A sample bias method (Gross et al 1981, Yang andSessler 1992) was used in this study and a schematic illustration of the experimental setup is shown in Figure 1b. The specimen current I sc through the sample is the contribution from both the primary electron beam and the leakage current from the bias voltage and can be written as I sc = I pb + I EBIC (1) a PC-based data logger consisting of a 12-bit Keithley ™ DAS-801 analog-to-digital card.…”

Section: Methodsmentioning

confidence: 99%

A study of electron beam‐induced conductivity in resists

Hwu

Joy

1999

Scanning

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Summary:The charging of polymeric resist materials during electron beam irradiation leads to significant problems during imaging and lithography processes. Charging occurs because of charge deposition in the polymer and charge generation/trapping due to formation of electron-hole pairs in the dielectric. The presence of such charge also results in the phenomena of electron beam-induced conductivity (EBIC). Electron beam-induced conductivity data have been obtained for three commercial e-beam resists under a variety of dose rate and temperature conditions. From the observed values of induced conductivity under varying conditions significant information about the generation of electron-hole pair and the transport of charge in the resist can be obtained. Three electron beam resists, EBR900, ZEP7000, and PBS are examined by an external bias method. The difference in resist chemistry is considered to play the role in the initial state EBIC behaviors among three resists even though the way that it affects the behaviors is not clear. A comparison of the power consumption comparison is proposed as a measure to give a preliminary estimate of the carrier concentration and carrier drift velocity differences among the resists. A simple single trap model with constant activation energy is proposed and provides good agreement with experiment.

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Radiation-induced conductivity in electron-beam irradiated insulating polymer films

Cited by 45 publications

References 15 publications

Charge Accumulation in Various Electron‐Beam‐Irradiated Polymers

Charge Accumulation in Various Electron‐Beam‐Irradiated Polymers

The use of the final thermally stimulated discharge current technique to study the molecular movements around glass transition

A study of electron beam‐induced conductivity in resists

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