2012
DOI: 10.1109/tns.2012.2222927
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Radiation Effects in Pinned Photodiode CMOS Image Sensors: Pixel Performance Degradation Due to Total Ionizing Dose

Abstract: International audienceSeveral Pinned Photodiode (PPD) CMOS Image Sensors (CIS) are designed, manufactured, characterized and exposed biased to ionizing radiation up to 10 kGy(SiO$_2$ ). In addition to the usually reported dark current increase and quantum efficiency drop at short wavelengths, several original radiation effects are shown: an increase of the pinning voltage, a decrease of the buried photodiode full well capacity, a large change in charge transfer efficiency, the creation of a large number of Tot… Show more

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Cited by 81 publications
(54 citation statements)
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“…The space charge region does not spread to touch the oxide layer and STI at lower TID, so the increased grayscale value of pixels caused by the dark current increase with TID is very small. However, with TID increase, SCR can touch the oxide layer and STI, in which case the traps caused by TID are rich [17]. The pixel grayscale value increases sharply with larger contact area between the SCR and STI.…”
Section: Radiation Damagementioning
confidence: 99%
“…The space charge region does not spread to touch the oxide layer and STI at lower TID, so the increased grayscale value of pixels caused by the dark current increase with TID is very small. However, with TID increase, SCR can touch the oxide layer and STI, in which case the traps caused by TID are rich [17]. The pixel grayscale value increases sharply with larger contact area between the SCR and STI.…”
Section: Radiation Damagementioning
confidence: 99%
“…Each effect is known to increase dark current in CIS using PPDs [8]- [10] and to induce DC-RTS. Moreover, changes in pinning voltage, Photon Transfer Curve (PTC), and especially Full Well Capacity (FWC), have been reported recently [10]. This is why this section presents proton induced ionizing and non-ionizing dose results.…”
Section: Cumulative Dose Effectsmentioning
confidence: 99%
“…With these advantages, it would seem very worthwhile to focus on digital CMOS image sensors integrating numerous electrical functions surrounding the pixel array in order to take full advantage of the CMOS technology. However, CMOS imagers are known to be sensitive to dose effects [5]- [7], especially when using pinned photodiodes [8]- [10], and digital CMOS functions are sensitive to single event effects [11]. Smart imagers integrating electronic functions therefore need to be evaluated to determine their tolerance to both dose and single event effects.…”
Section: Introductionmentioning
confidence: 99%
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“…CIS115s will undergo testing up to twice this dose using a Co-60 cell as a gamma irradiation source. The lag performance is expected to be affected [7], and other changes in performance will be measured. Furthermore, a complete and detailed space qualification process is planned for the CIS115s, including further proton and gamma testing as well as exposure to heavy ions to study for single event effects and an electron irradiation to study the combination of TID and displacement damage.…”
mentioning
confidence: 99%