Radiation damage by light- and heavy-ion bombardment of single-crystal LiNbO_3

Huang, Hsu-Cheng; Zhang, Lihua; Malladi, Girish; Dadap, Jerry I.; Manandhar, Sandeep; Kisslinger, Kim; Vemuri, R.S.; Shutthanandan, V.; Bakhru, H.; Osgood, Richard M.

doi:10.1364/ome.5.001071

Cited by 10 publications

(6 citation statements)

References 38 publications

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“…After cleaning, a $250°C annealing cycle was performed to provide thermal activation for helium ion-slicing. Note that as reported earlier [19], annealing at 250°C does not fully anneal out any heavy ion-induced damage. Thus, this annealing step serves only to activate (increase) the He-induced selective etching.…”

Section: Resultssupporting

confidence: 49%

“…The importance of this experiment is that it shows that application of the heavy-ion irradiation does not alter conditions for ion-slicing conditions. However, note that the pre-existing damage from He + has been shown in separate effects to affect the damage distribution of a successive Fe + irradiation [19], thereby altering (reducing) the dose needed for patterning. Thus, it is important to determine the full process parameters using both ion steps and not to rely on parameters from isolated and separate steps.…”

Section: Resultsmentioning

confidence: 99%

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Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3

et al. 2015

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a b s t r a c tThe induced selective etching properties of LiNbO 3 in a sample subjected to ion processing using sequential light-and heavy-ion irradiation are investigated and discussed. Through the use of TEM and SEM, the lattice structure at the amorphous-crystalline interface is examined after heavy ion exposure and it is found that single-energy amorphizing irradiation results in undercut etching at the interface, while multiple-energy irradiation yields sharper features. Such sequential-irradiation process based on both lightand heavy-ion irradiation enables ready fabrication of concomitant high-resolution patterning and exfoliation of structured freestanding thin films.

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Section: Resultssupporting

confidence: 49%

Section: Resultsmentioning

confidence: 99%

Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3

et al. 2015

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“…Sequential irradiation of He and Fe ion with relative low energy has revealed the enhanced accumulation behavior of irradiation damage in LiNbO 3 crystal. However, this, ultimately, has been attributed to the formation of long-range strain/stress field coming from the irradiated He inclusions [29]. In view of all the above-mentioned irradiation effects, it should be quite attractive to study the damage behavior of LiNbO 3 crystal irradiated by ions with a wide energy range in order to further evaluate irradiation effect induced by non-correlated nuclear collisions and electronic excitations, and the possible competitive or synergistic effect between these two kinds of interactions and the coupled irradiation phenomenon [6,7,30,31].…”

Section: Introductionmentioning

confidence: 99%

A coupled effect of nuclear and electronic energy loss on ion irradiation damage in lithium niobate

et al. 2016

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Understanding irradiation effects induced by elastic energy loss to atomic nuclei and inelastic energy loss to electrons in a crystal, as well as the coupled effect between them is a scientific challenge. Damage evolution of LiNbO 3 irradiated by 0.9 and 21 MeV Si ions at 300 K has been studied utilizing Rutherford backscattering spectrometry and channeling technique. During the low-energy ion irradiation process, damage accumulation produced due to elastic collisions is described utilizing a disorder accumulation model. Moreover, low electronic energy loss is shown to induce observable damage that increases with ion fluence. For the same electronic energy loss, velocity of the incident ion could affect the energy and spatial distribution of excited electron, and therefore effectively modify the diameter of the ion track.

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“…[65] SEM-EDS combined with XRD mapping can confirm the presence of lattice damage, deformation, and stress in the structure of doped elements, [66] and it can observe how the doped elements are distributed in the structure. [67] SEM has been widely used to investigate the domain structures of LN ferroelectrics. Since the 1970s, it has also been used to image ferroelectric domains.…”

Section:  Scanning Electron Microscopymentioning

confidence: 99%

Omni‐functional crystal: Advanced methods to characterize the composition and homogeneity of lithium niobate melts and crystals

Chen

et al. 2022

Exploration

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Lithium niobate (LN) is a type of multifunctional dielectric and ferroelectric crystal that is widely used in acoustic, optical, and optoelectronic devices. The performance of pure and doped LN strongly depends on various factors, including its composition, microstructure, defects, domain, and homogeneity. The structure and composition homogeneity can affect both the chemical and physical properties of LN crystals, including their density, Curie temperature, refractive index, and piezoelectric and mechanical properties. In terms of practical demands, both the composition and microstructure characterizations these crystals must range from the nanometer scale up to the millimeter and wafer scales. Therefore, LN crystals require different characterization technologies when verifying their quality for various device applications. Optical, electrical, and acoustic technologies have been developed, including x-ray diffraction, Raman spectroscopy, electron microscopy, and interferometry. To obtain detailed structural information, advanced sub-nanometer technologies are required. For general industrial demands, fast and non-destructive technologies are preferable. This review outlines the advanced methods used to characterize both the composition and homogeneity of LN melts and crystals from the micro-to wafer scale.

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Radiation damage by light- and heavy-ion bombardment of single-crystal LiNbO_3

Cited by 10 publications

References 38 publications

Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3

Characterization of selective etching and patterning by sequential light- and heavy-ion irradiation of LiNbO3

A coupled effect of nuclear and electronic energy loss on ion irradiation damage in lithium niobate

Omni‐functional crystal: Advanced methods to characterize the composition and homogeneity of lithium niobate melts and crystals

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