Quartz orientations for optimal power efficiency in wireless SAW temperature sensors

Shvetsov, A.; Zhgoon, Sergei; Antcev, Ivan; Bogoslovsky, Sergei; Sapozhnikov, Gennadiy

doi:10.1109/eftf.2016.7477825

Cited by 8 publications

(8 citation statements)

References 6 publications

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“…The resonators central frequency was noticed to be slightly shifted outside the 433 MHz band, which can be easily corrected through a new design. The figure of merit obtained by the product of and 2 is also improved by 38% through this optimization process, and also proves the usability of such structures for wireless operation [27].…”

Section: Fabrication and Characterization Of Optimized Resonatorsmentioning

confidence: 53%

Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

et al. 2020

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Aluminium nitride piezoelectric thin films grown on sapphire are strong candidates for high-temperature surface acoustic wave (SAW) sensors, due to their thermal stability, large bandgap, high acoustic velocity and suitable electromechanical coupling. However, thin-film resonators need more design efforts than those based on bulk crystals, due to the usually limited thickness of the piezoelectric films, and to acoustic properties disparities between the latters and their host substrate. This work presents an optimization of AlN/Sapphire-based SAW resonators with high quality factors for high-temperature applications. It combines specifically grown, 3 µm-thick aluminium nitride films, with the use of aluminium electrodes for their low density and resistivity, as an alternative to heavier electrodes like Pt. These electrodes allow for much lower mechanical losses and higher quality factors, in spite of needing passivation for increased lifetime. A standard resonator design is first presented and used for preliminary tests, in order to monitor the AlN/Sapphire structure with unprotected aluminium electrodes, for temperatures up to 600°C. A quasi-synchronous, optimized design is then proposed for higher quality factors and wireless sensing compliance. The high temperature characterizations confirmed that much larger quality factors can be retrieved from this optimized design. The quasi-synchronous resonators proposed in this study remain well-tuned for temperatures up to 400°C, and show high quality factors, as high as 3400 at 400°C.

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Section: Fabrication and Characterization Of Optimized Resonatorsmentioning

confidence: 53%

Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

et al. 2020

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“…This factor, which gives a precise indication of the re-radiated energy, makes it possible to evaluate the potential of using the resonator as a wireless sensor. A value greater than two is very promising [34,35]. In order to evaluate the potential of using the Pt/AlN/Sapphire structure as a wireless temperature sensor in a harsh environment, we have plotted the figure of merit versus the normalized thickness.…”

Section: Resultsmentioning

confidence: 99%

Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

et al. 2021

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This paper presents a two-dimensional FEM (Finite Element Method) modeling and simulation of a surface acoustic wave (SAW) resonator based on a layered Pt/AlN/Sapphire structure. Such structure that exploits the electromechanical coupling of piezoelectric film is of high interest for harsh environments. By harsh environment we mean any environment that could hinder the operation of the device. Hardness can come from a variety of sources, and examples include the following: High pressure, High temperature, Shock/high vibration, Radiation, Harsh chemicals, etc. As part of this work, we are looking for high temperature sensor applications and only operating drifts due to temperature will be studied. SAW resonator is made from piezoelectric thin film Aluminum Nitride (AlN) layer on Sapphire substrate. Modal analysis is used to determine the eigen mode and the eigenfrequency of the system and the study of the frequency domain is used to determine the response of the model under influence of a harmonic excitation for one or more frequencies. In the FEM modeling, various parameters of the surface waves in the films, such as the surface velocity, the displacement of the piezoelectric thin film, the electrical potential, the electromechanical coefficient (k2), and the quality factor (Q) were studied. A comparative study between modeled and experimental curves showed a good agreement and allowed to validate our simulation method. Finally, a FEM study of the influence of normalized thickness of AlN thin film on resonator performances was carried out and compared with theorical results of literature.

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“…Still, to allow wireless measurement, not only the Q value is important, but also the K 2 . Indeed, following [20] the efficiency of energy re-radiation requires that the product Q•KC be over 4, where KC = CS/C, C being the motional capacitance and CS being the static capacitance in the resonator equivalent circuit; their ratio strongly depends on K 2 . In addition, tests with the silicone-based Solaris elastomer (see II.B) were carried out to prove the wave confinement.…”

Section: B Impedance Measurements and Discussionmentioning

confidence: 99%

AlN/ZnO/LiNbO₃Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

Floer

Hage-Ali

Zhgoon

et al. 2018

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Surface acoustic wave sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications. In this regard, packageless solutions are very promising. This paper describes the potential of the AlN/ZnO/LiNbO structure for packageless acoustic wave sensors. This structure, based on the waveguided acoustic wave principle, is studied numerically and experimentally. According to the COMSOL simulations, a wave, whose particle displacement is similar to a Rayleigh wave, is confined within the structure when the AlN film is thick enough. This result is confirmed by comprehensive experimental tests, thus proving the potential of this structure for packageless applications, notably temperature sensing.

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Quartz orientations for optimal power efficiency in wireless SAW temperature sensors

Cited by 8 publications

References 6 publications

Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

AlN/ZnO/LiNbO₃Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

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Quartz orientations for optimal power efficiency in wireless SAW temperature sensors

Cited by 8 publications

References 6 publications

Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

AlN/ZnO/LiNbO3Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

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AlN/ZnO/LiNbO₃Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications