Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

Streque, Jérémy; Camus, J.; Laroche, Thierry; Hage-Ali, Sami; M'Jahed, Hamid; Rammal, M.; Aubert, Thierry; Djouadi, M.A.; Ballandras, S.; Elmazria, O.

doi:10.1109/jsen.2020.2978179

Cited by 40 publications

(13 citation statements)

References 24 publications

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“…This factor, which gives a precise indication of the re-radiated energy, makes it possible to evaluate the potential of using the resonator as a wireless sensor. A value greater than two is very promising [34,35]. In order to evaluate the potential of using the Pt/AlN/Sapphire structure as a wireless temperature sensor in a harsh environment, we have plotted the figure of merit versus the normalized thickness.…”

Section: Resultsmentioning

confidence: 99%

Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

et al. 2021

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This paper presents a two-dimensional FEM (Finite Element Method) modeling and simulation of a surface acoustic wave (SAW) resonator based on a layered Pt/AlN/Sapphire structure. Such structure that exploits the electromechanical coupling of piezoelectric film is of high interest for harsh environments. By harsh environment we mean any environment that could hinder the operation of the device. Hardness can come from a variety of sources, and examples include the following: High pressure, High temperature, Shock/high vibration, Radiation, Harsh chemicals, etc. As part of this work, we are looking for high temperature sensor applications and only operating drifts due to temperature will be studied. SAW resonator is made from piezoelectric thin film Aluminum Nitride (AlN) layer on Sapphire substrate. Modal analysis is used to determine the eigen mode and the eigenfrequency of the system and the study of the frequency domain is used to determine the response of the model under influence of a harmonic excitation for one or more frequencies. In the FEM modeling, various parameters of the surface waves in the films, such as the surface velocity, the displacement of the piezoelectric thin film, the electrical potential, the electromechanical coefficient (k2), and the quality factor (Q) were studied. A comparative study between modeled and experimental curves showed a good agreement and allowed to validate our simulation method. Finally, a FEM study of the influence of normalized thickness of AlN thin film on resonator performances was carried out and compared with theorical results of literature.

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Section: Resultsmentioning

confidence: 99%

Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

et al. 2021

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“…Such AlN/Sapphire SAW delay line using Iridium as electrodes could be operated for more than 40 hours up to 1140 °C [118], limited by electrodes instability. Recently resonators with high quality factor up to 8000 were achieved on an AlN/Sapphire structure [119]. These results are very promising for the achievement of wireless SAW sensors suited for high temperature environments.…”

Section: B Acoustic Waves Based Platforms For Physical Parameters Monitoring In Harsh Environmentsmentioning

confidence: 97%

Passive Resonant Sensors: Trends and Future Prospects

et al. 2021

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Sensors based on "resonance phenomenon" span a broad spectrum of important current applications including detection of biological and chemical agents, and measurements of physical quantities. Resonance phenomena occur with all types of waves: electromagnetic, optic, and acoustic. This review reports about the most recent advances in the design and applications of resonant "passive" sensors, i.e. resonant sensors able to operate with a distant power source and/or able to communicate with a distant transceiver. The sensors considered in this review include acoustic, magnetoelastic, and electromagnetic transducers. They are presented through their relevant technological aspects and through they major advantages which include their integrability within embedded systems and/or systems requiring energy autonomy. Furthermore, the use of these resonant sensors is illustrated in a large variety of applications, ranging from environmental monitoring, structural health monitoring, food packaging monitoring, wearable or implanted sensors for the monitoring of physiological parameters in healthcare related applications, to IoT and future industry monitoring applications.

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“…Low sensitivity to external environmental factors can be achieved by optimizing the cutting shape of piezoelectric materials. At present, SAW devices have been widely used as temperature sensors, humidity sensors, chemistry sensors, acceleration sensors, biology, and torque sensors [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure

Wang

et al. 2022

Sensors

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A three-dimensional finite element analysis model of surface acoustic wave (SAW) torque sensor based on multilayer structure is proposed in this paper. Compared with the traditional saw torque sensor with quartz as piezoelectric substrate, the SAW torque sensor with multilayer structure has the advantages of fast propagation speed and high characteristic frequency. It is a very promising torque sensor, but there is very little related research. In order to successfully develop the sensor, it is essential to understand the propagation characteristics and torque sensing mode of SAW in multilayer structure. Therefore, in this study, we first established a multi-layered finite element analysis model of SAW device based on IDT/128° Y-X lithium niobate/diamond/Si (100). Then, the effects of different film thicknesses on the characteristic frequency, electromechanical coupling coefficient, s parameter, and mechanical quality factor of SAW device without changing the wavelength are analyzed. Then, based on the finite element analysis, a three-dimensional research model of a new SAW torque sensor suitable for small diameter torsion bar (d = 10 mm) is established, and the relationship between saw device deformation and torque under the condition of small torque (±40 Nm) is tested. The shape variable is introduced into the finite element analysis model of multi-layer SAW device. Finally, the relationship between saw torque sensor with multi-layer structure and torque is established by using the deformation relationship, which shows the perfect curve of sensor performance.

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Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications

Cited by 40 publications

References 24 publications

Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

Modeling and Electrical Characterization of a Bilayer Pt/AlN/Sapphire One Port Resonator for Sensor Applications

Passive Resonant Sensors: Trends and Future Prospects

A Three-Dimensional Finite Element Analysis Model of SAW Torque Sensor with Multilayer Structure

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