The static polarizabilities a c of the isolated semiconductor clusters Si N , Ga N As M , and Ge N Te M have been investigated in dependence of cluster size and temperature. The results for the Si N clusters are discussed within a two-band semiconductor model that includes a widening of the band gap due to quantum size effects. Additionally, the importance of defectlike electronic states is discussed for Si N and Ga N As M clusters. The temperature dependence of the polarizability values for several Ga N As M and Ge N Te M species gives evidence for vibronic (ionic) contributions to a c . PACS numbers: 36.40.CgThe aim of this Letter is to investigate the question of how the static dielectric constant, or the polarizability, of a small semiconductor particle depends on its size. Up to now, this problem has been studied only theoretically. By generalizing the well-known two-band semiconductor model (Penn model [1]), Tsu et al. [2] have demonstrated that the static dielectric constant´͑0͒ is significantly reduced for nanometer-sized particles compared to the bulk value. Wang and Zunger [3] have calculated the reduction in the dielectric constant from global blueshifts in the clusters absorption spectra. Absorption spectra have been already investigated for semiconductor colloids [4], oxidized nanospheres [5], and isolated clusters [6]. Experimental information on cluster polarizabilities are only available for the metal clusters Na N 2 , K N 2 , and Al N [7]. Theoretical a c values of isolated semiconductor clusters are only available for Si 7 2 , Si 10 2 , and Si 13 [8,9].We have measured the polarizabilities of three types of isolated semiconductor clusters with 4-120 atoms in order to throw light upon their dielectric properties. Moreover, the results will allow us to discuss the important role of defect states for the polarizability of semiconductor clusters by means of simple models. Such defects, like, e.g., dangling bonds, are expected especially at the surfaces of the clusters [10,11].The experimental apparatus has been already described in detail elsewhere [12,13]. The clusters are produced by a pulsed laser vaporization cluster source [13]. The clusters leave the source through a nozzle with adjustable nozzle temperature and form a molecular beam. The beam is collimated and then deflected by an inhomogeneous electric field. The deflections are measured for each cluster size by means of a collimated ionization laser beam which scans the cluster beam. Thereby, we obtain size selective cluster beam profiles by detecting the ionized clusters with a time-of-flight mass spectrometer for each scanning position. The velocities y of the clusters in the beam are measured size selective by means of a chopper. Figure 1(a) shows a typical beam profile for Ga N As M clusters ͑N 1 M 14͒ with and without deflecting field ͑E ഠ 20 kV͞mm͒. In principle, the profiles correspond to a distribution of the clusters with all possible N͞M compositions, since all the corresponding masses can hardly be resolved by simultaneously obta...