2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) 2018
DOI: 10.1109/icmts.2018.8383787
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Quantitative model of CMOS inverter chain ring oscillator's effective capacitance and its improvements in 14nm FinFET technology

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Cited by 3 publications
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“…5(c). The smaller separation distance leads to reduced device capacitance due to less gate-S/D overlap area [28] and mitigated gate fringing effects [4], which are the largest components of parasitic capacitance in a multi-gate CMOS logic circuit [41]- [43]. It is also observed that as DN/P is reduced, the slope of Ceff decreases as the capacitive coupling between the top and bottom device increases with closer distance.…”
Section: B Ac Electrothermal Characteristics Of Cfet In Cmos Inverter Operationsmentioning
confidence: 99%
“…5(c). The smaller separation distance leads to reduced device capacitance due to less gate-S/D overlap area [28] and mitigated gate fringing effects [4], which are the largest components of parasitic capacitance in a multi-gate CMOS logic circuit [41]- [43]. It is also observed that as DN/P is reduced, the slope of Ceff decreases as the capacitive coupling between the top and bottom device increases with closer distance.…”
Section: B Ac Electrothermal Characteristics Of Cfet In Cmos Inverter Operationsmentioning
confidence: 99%